Fabry-Perot Filter Voltage Control for Measurement Stability

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Solution Overview

Problem

Existing optical measurement systems using Fabry-Perot interference filters face issues with voltage overshoot, leading to potential sticking and instability during wavelength control, which can result in inaccurate measurements.

Innovation Solution

The optical measurement system gradually increases the potential difference between mirror portions to control the wavelength, preventing overshoot and ensuring stable measurements by allowing the voltage to rise gradually until it reaches the set value, and includes a standby time to stabilize temperature and reduce wavelength variations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If voltage is rapidly applied to control the wavelength, then the response speed is improved, but overshoot occurs causing the gap to become smaller than target and sticking may occur

Engineering Contradiction:
Improvevoltage application speedVSAvoidmeasurement stability
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent applies preliminary action by gradually increasing the voltage from 0V to the target voltage in staged increments (e.g., 0V → 5V → 10V → target voltage) before the measurement is actually needed. This gradual voltage application prevents overshoot and pull-in phenomenon, ensuring the movable substrate reaches the target gap position accurately without causing sticking, thus resolving the contradiction between fast response and measurement stability.

Inventive Principle:
Principle #10Preliminary action

2Loss of time

If voltage is rapidly applied, then the measurement time is reduced, but the gap becomes smaller than target due to overshoot

Engineering Contradiction:
Improvemeasurement timeVSAvoidgap position precision
Core Design Contradiction:
Loss of timeVSManufacturing precision

Solution Approach 1:

The patent implements preliminary action by pre-applying voltage in controlled stages to position the movable substrate at the target gap distance before the actual measurement begins. This ensures precise gap positioning without overshoot, and the system is ready for immediate measurement, thereby minimizing measurement time while maintaining high positioning precision.

Inventive Principle:
Principle #10Preliminary action

3Adaptability or versatility

If voltage is increased to reach target wavelength, then the wavelength control range is improved, but sticking occurs due to pull-in phenomenon

Engineering Contradiction:
Improvewavelength control rangeVSAvoidmeasurement stability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent applies preliminary action by gradually increasing voltage in staged increments to reach the target voltage corresponding to the desired wavelength. This gradual voltage application prevents sudden large electrostatic forces that cause pull-in phenomenon and sticking, while still achieving the full wavelength control range. The movable substrate is steadily positioned at each voltage stage, ensuring reliable measurements across the entire wavelength range.

Inventive Principle:
Principle #10Preliminary action

4Speed

If voltage is rapidly changed, then the response time is improved, but temperature variation causes wavelength shifts

Engineering Contradiction:
Improvevoltage response timeVSAvoidwavelength measurement accuracy
Core Design Contradiction:
SpeedVSMeasurement precision

Solution Approach 1:

The patent implements preliminary action by applying voltage gradually in stages and maintaining each voltage level for a stabilization period before proceeding to the next voltage level. This allows the temperature to stabilize at each stage, preventing temperature-induced wavelength shifts. The system reaches the target voltage and stabilizes before measurement begins, ensuring high wavelength measurement accuracy while maintaining efficient response time.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables stable and accurate optical measurements by preventing sticking and minimizing wavelength variations, allowing for continuous high-speed measurement of multiple samples.

Implementation Method 1

an electrostatic actuator that changes a gap dimension between the pair of reflecting films

Methodology Applied
Scientific EffectElectrostatic actuation: Electrostatics

Implementation Method 2

a Fabry-Perot interference filter including a first mirror portion and a second mirror portion opposed to each other with a gap therebetween, and a light reception element that receives light transmitted through the Fabry-Perot interference filter

Methodology Applied
Scientific EffectFabry-Perot interference: Fabry-Perot Interferometer

Implementation Method 3

Fabry-Perot interference filter

Methodology Applied
Scientific EffectInterference: Interference

Data Source

PatentEP3620764B1Optical measurement control program, optical measurement system, and optical measurement method
Publication Date: 2024.01.03 HAMAMATSU PHOTONICS KK
  • EP3620764B1 patent drawingFigure 1
  • EP3620764B1 patent drawingFigure 2
  • EP3620764B1 patent drawingFigure 3

AI summary

Provided is an optical measurement control program in a light detection device including: a Fabry-Perot interference filter having a pair of mirror portions facing each other via a gap, a distance between the pair of mirror portions changing according to the potential difference generated between the pair of mirror portions; and a light detector detecting light transmitted through the Fabry-Perot interference filter, the optical measurement control program causing a computer to execute a process of measuring light to be measured by acquiring an electric signal output from the light detector, the optical measurement control program causing the computer to function as: a voltage control unit controlling the potential difference generated between the pair of mirror portions to gradually increase until the potential difference reaches a set potential difference corresponding to a wavelength of the light to be measured before the acquisition of the electric signal is started; and a signal acquisition unit acquiring the electric signal in a state where the voltage control unit allows the set potential difference to be generated between the pair of mirror portions.