Faceless Showerhead Structure for Uniform Gas Flow and Low Particles
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Solution Overview
Problem
Conventional showerheads for substrate processing, particularly in AlOx processes, are prone to flaking and particle generation due to the presence of a plenum and thousands of holes, leading to high costs and maintenance issues, and in-situ cleaning is difficult.
Innovation Solution
A faceless showerhead design that eliminates the plenum and faceplate, utilizing a backing plate and baffle structure with support elements to distribute precursor gases, allowing for easier cleaning and reduced hardware costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a plenum and faceplate with thousands of holes are used in conventional showerheads, then gas distribution uniformity is achieved, but hardware cost increases and flaking/particle generation occurs
Solution Approach 1:
The patent removes the plenum and faceplate components from the conventional showerhead design, extracting only the essential gas distribution function. The simplified structure eliminates thousands of holes and complex assemblies while maintaining precursor gas delivery capability through a more robust backing plate configuration.
Solution Approach 2:
The simplified showerhead design uses fewer, more durable components that can be easily replaced if needed. The backing plate structure requires less maintenance and can be disposed of or replaced more economically than complex plenum assemblies, reducing long-term operational costs.
2Manufacturing precision
If a plenum structure is used in conventional showerheads, then gas distribution is achieved, but maintenance cost and labor increase due to cleaning difficulties
Solution Approach 1:
The plenum component is completely removed from the design, eliminating the complex internal passages and surfaces that require cleaning. This extraction of the problematic component directly addresses the maintenance difficulty while preserving gas distribution through alternative means.
Solution Approach 2:
The showerhead design focuses cleaning requirements on specific, accessible surfaces rather than complex internal plenum structures. The localized approach to gas delivery creates surfaces that are easier to access and clean, improving maintenance ease without sacrificing gas distribution performance.
3Manufacturing precision
If thousands of holes are present in the faceplate, then precursor gas distribution uniformity is achieved, but particle generation and flaking increase
Solution Approach 1:
The faceplate with thousands of holes is removed entirely. The patent extracts only the necessary gas distribution function and implements it through a different structural approach using the backing plate, eliminating the source of flaking and particle generation associated with extensive hole patterns.
Solution Approach 2:
The backing plate may utilize composite material structures or coatings that provide both gas distribution capability and enhanced durability. This composite approach maintains precursor gas distribution uniformity while resisting flaking and particle generation through material properties rather than relying on numerous holes.
Data Source
AI summary
In some examples, a faceless showerhead comprises a body including a backing plate, the body devoid of a faceplate or plenum; a gas supply stem to admit gas into the showerhead; and a baffle supported adjacent the backing plate or the gas supply stem. The faceless showerhead may further comprise at least one support element for supporting the baffle in a baffle cavity in the backing plate or the gas supply stem.