Facet Adaptor Cryopump for Cluster Tool Vacuum Recovery
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Solution Overview
Problem
Cluster tools experience long recovery times for the transfer chamber to return to vacuum pressure, leading to reduced throughput and increased costs due to complex and costly valve configurations, as well as downtime during cryogenic pump regeneration operations.
Innovation Solution
The introduction of a facet adaptor between the load lock and transfer chambers, equipped with a cryogenic surface for selective evacuation, reduces pressure spikes and allows for quicker vacuum recovery, and shares a common cryogenic pump to minimize downtime during regeneration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a load lock chamber is connected to a transfer chamber with a valve to maintain vacuum conditions, then vacuum conditions are maintained, but the recovery time for the transfer chamber to return to vacuum pressure becomes long
Solution Approach 1:
The system is divided into separate functional chambers (load lock chamber, transfer chamber, pump chamber) that can be independently evacuated and controlled. This segmentation allows the transfer chamber to be quickly re-evacuated after wafer transfer without waiting for the entire system to pump down, reducing recovery time while maintaining vacuum integrity through controlled valve operations.
2Ease of operation
If multiple valves are used to separate chambers and control wafer transfer, then precise valve control is achieved, but the overall cost of the cluster tool increases
Solution Approach 1:
Multiple valve functions are consolidated into a single valve located in the pump chamber. This valve controls both the connection between the transfer chamber and pump chamber, and the connection between the load lock chamber and pump chamber, eliminating the need for separate isolation valves in each chamber and reducing overall system complexity and cost.
Solution Approach 2:
The single valve in the pump chamber serves multiple functions: isolating the transfer chamber during pumping, isolating the load lock chamber during pumping, controlling wafer transfer, and enabling independent evacuation of different chambers. This multi-functional design reduces the total number of valves required in the system.
3Reliability
If regeneration operations are performed on a cryogenic pump to remove materials from the pumping surface, then pump performance is restored, but manufacturing processing must be suspended
Solution Approach 1:
The pump system is segmented into independent pump chambers that can be independently operated and regenerated. When one cryogenic pump requires regeneration, the other pump chamber can continue to maintain vacuum conditions in the transfer chamber, allowing wafer transfer operations to continue without interruption. This independent segmentation of pump functions enables continuous operation during regeneration maintenance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution significantly reduces the recovery time of the transfer chamber to vacuum pressure, decreases the number of costly valves, and enables continuous operation by allowing regeneration of one cryogenic pump without halting the entire system.
Implementation Method 1
A cryogenic surface is associated with the adaptor and is configured to selectively evacuate the interior space
Data Source
AI summary
A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.