Facet Assembly Hollow Chamber Deformation Lithography
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Solution Overview
Problem
Existing facet assemblies in illumination optical units for projection lithography lack flexibility and precision in achieving targeted deformation of the reflection surface, which is crucial for high illumination light guidance precision.
Innovation Solution
The facet assembly incorporates a facet main body with at least one hollow chamber, where the reflection surface chamber walls form reflection surface portions. This design decreases the stiffness of the reflection surface, allowing for targeted deformation controlled by actuators, thereby increasing flexibility and precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the reflection surface is made rigid to maintain structural stability, then structural stability is improved, but the ability to achieve targeted deformation of the reflection surface deteriorates
Solution Approach 1:
The facet main body is divided into multiple hollow chambers, with each chamber's reflection surface chamber wall forming a separate reflection surface portion. This segmentation allows independent deformation control of different regions while maintaining overall structural stability through the segmented architecture.
Solution Approach 2:
The hollow chamber structure transforms the rigid reflection surface into a dynamically adjustable one. By controlling the hollow chambers, the reflection surface can be deformed on-demand to achieve targeted shapes while the overall facet assembly maintains structural stability through its engineered hollow chamber architecture.
2Manufacturing precision
If the reflection surface stiffness is decreased to enable deformation, then deformation precision is improved, but structural stability deteriorates
Solution Approach 1:
Dividing the facet main body into multiple hollow chambers creates localized flexible regions that can be precisely deformed independently. Each segmented chamber can be controlled to achieve specific deformation targets while the segmented structure as a whole maintains structural stability.
Solution Approach 2:
The hollow chamber structure changes the physical parameters of the reflection surface by creating controlled void spaces. This parameter change reduces local stiffness to enable precise deformation while the overall structural stability is maintained through the engineered chamber configuration and support structures.
3Adaptability or versatility
If multiple hollow chambers are used to increase deformation flexibility, then deformation flexibility is improved, but device complexity increases
Solution Approach 1:
The facet main body is segmented into multiple hollow chambers that can be independently controlled. This segmentation provides deformation flexibility across different regions while the modular segmented design actually simplifies the overall assembly process compared to attempting to create complex deformations in a monolithic structure.
Solution Approach 2:
The hollow chamber structure serves multiple functions simultaneously: it provides structural support, enables controlled deformation, facilitates thermal management, and allows for integrated actuator placement. This multi-functionality reduces the need for separate components, thereby reducing overall device complexity despite the presence of multiple chambers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The decreased stiffness of the hollow chamber embodiment enables precise deformation of the reflection surface, enhancing the flexibility and accuracy of the facet assembly in guiding illumination light, which is essential for high-performance projection lithography.
Implementation Method 1
embodying the facet main body with at least one hollow chamber, wherein a reflection surface chamber wall of the hollow chamber forms at least one reflection surface portion, can decrease a stiffness of the reflection surface of the facet of the facet assembly
Data Source
AI summary
A facet assembly is a constituent part of a facet mirror for an illumination optical unit for projection lithography. The facet assembly has a facet with a reflection surface for reflecting illumination light. A facet main body of the facet assembly has at least one hollow chamber. A reflection surface chamber wall of the hollow chamber forms at least one portion of the reflection surface. An actuator control apparatus of the facet assembly is operatively connected to the hollow chamber for the controlled deformation of the reflection surface chamber wall. The result is a facet assembly that is usable flexibly as a constituent part of a facet mirror equipped therewith within an illumination optical unit for projection lithography.