Facet Mirror Park Positions for Illumination Switching
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Solution Overview
Problem
Current methods for illuminating object fields in projection exposure apparatuses lack efficient control over illumination channels and intensity modulation, leading to suboptimal lithographic structuring and micro/nanostructured component production due to limitations in switching times and flexibility.
Innovation Solution
The method involves a multiplicity of displaceable individual mirrors forming facets, with predetermined target and park positions, allowing for rapid switching between illumination channels and intensity modulation, enabling precise control over illumination profiles and compensation for heterogeneities in wafer fields.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If individual mirrors are positioned in target positions to form illumination channels, then illumination precision is improved, but switching time increases
Solution Approach 1:
Park positions are predetermined locations where individual mirrors are positioned in advance, ready for quick switching to target positions. This preliminary positioning reduces the time required to switch between illumination channels while maintaining precise illumination when mirrors reach their target positions.
Solution Approach 2:
The system dynamically switches individual mirrors between park positions and target positions based on illumination requirements. This dynamic repositioning allows the illumination system to adapt quickly to different illumination channels while maintaining precision through controlled positioning.
2Adaptability or versatility
If individual mirrors are displaceable to form multiple illumination channels, then adaptability is improved, but device complexity increases
Solution Approach 1:
The facet mirror is segmented into multiple individual mirrors that can be independently positioned. This segmentation allows each mirror to be controlled separately to form different illumination channels, providing adaptability while managing complexity through modular control of discrete elements.
Solution Approach 2:
Individual mirrors serve multiple functions by being repositionable between different target positions and park positions. The same physical mirror can contribute to different illumination channels at different times, providing versatility without requiring separate mirrors for each channel.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables fast and flexible illumination control, reducing switching times to milliseconds, allowing for intra-die and inter-die modulation, and compensating for field heterogeneities, thereby improving lithographic structuring and component production quality.
Implementation Method 1
The illumination optical unit includes a first facet mirror with a multiplicity of first facets, and a second facet mirror with a multiplicity of second facets
Data Source
AI summary
A method for illuminating an object field of a projection exposure apparatus includes providing a subset of first facets to be positioned in park positions, which are each spaced apart from an associated target position, but at most by a maximum distance.