Facilities Module Layout for Modular Vacuum Abatement Systems

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

The design and installation of bespoke vacuum pumping and abatement systems are time-consuming due to the need for customized solutions for different processes, requiring different equipment and configurations for various gases and substances, leading to prolonged design, manufacturing, and installation times.

Innovation Solution

A modular vacuum pumping and abatement system with a facilities module that centralizes the receipt and distribution of facilities such as fluids, power, and signals, and controls the operation of remote vacuum pumping and abatement apparatuses, allowing for a standardized and efficient installation process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If bespoke vacuum pumping and abatement systems are designed for different processes, then the system can be tailored to specific process requirements (different gases, pressures, flows), but the design, manufacturing and installation time is prolonged

Engineering Contradiction:
Improveprocess-specific customizationVSAvoiddesign and installation time
Core Design Contradiction:
Adaptability or versatilityVSLoss of time

Solution Approach 1:

The system is divided into separate functional modules (vacuum pumping modules, abatement modules, facilities module) that can be independently designed, manufactured, and installed. Each module serves a specific function and can be configured for different processes without requiring complete system redesign, thus reducing overall design and installation time while maintaining process-specific adaptability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The facilities module provides universal support functions (power distribution, fluid supply, control) that can serve multiple different vacuum and abatement processes. This standardized facilities infrastructure reduces design time for each new process while still allowing customization of the specific vacuum and abatement equipment needed for different applications.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If different vacuum pumping and abatement equipment is used for different processes, then optimal performance for each process is achieved, but the complexity of system design and configuration increases

Engineering Contradiction:
Improveprocess optimizationVSAvoidsystem configuration complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

By segmenting the system into standardized functional modules, each optimized for specific processes, the complexity of configuring different equipment for different processes is reduced. Modules can be selectively assembled based on process requirements rather than designing complete custom systems, maintaining optimal performance while simplifying configuration.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The facilities module acts as an intermediary that standardizes the interface between different vacuum/abatement processes and the support infrastructure. It provides unified power, fluid, and control connections that simplify system configuration while allowing diverse process-specific equipment to operate optimally.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Productivity

If modular design is implemented with a facilities module, then installation time and complexity are reduced, but the width of the facilities module must be constrained to fit standard configurations

Engineering Contradiction:
Improveinstallation efficiencyVSAvoidmodule width constraint
Core Design Contradiction:
ProductivityVSArea of stationary object

Solution Approach 1:

The facilities module is designed with a constrained width (≤0.5m, preferably ≤0.15m) to fit standard installation spaces, while accommodating all necessary facilities (power, fluids, controls) by utilizing vertical space and internal routing. This dimensional constraint drives efficient space utilization without compromising installation efficiency or functional capabilities.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentEP3710700B1A module for a vacuum pumping and/or abatement system
Publication Date: 2023.03.08 EDWARDS LTD
  • EP3710700B1 patent drawingFigure 1
  • EP3710700B1 patent drawingFigure 2
  • EP3710700B1 patent drawingFigure 3

AI summary

A module for a vacuum pumping and/or abatement system. The module comprises a frame defining a space, a plurality of facilities inputs configured to receive facilities from a facilities supply, a plurality of facilities outputs configured to output the received facilities out of the module, and a plurality of facilities connection lines located at least partially within the space defined by the frame. The plurality of facilities connection lines connect the facilities inputs to the facilities outputs. The module further comprises a controller configured to control supply of facilities received at the facilities inputs out of the facilities outputs; and control operation of one or more vacuum pumping and/or abatement apparatuses remote from the module.