Fan Filter Unit Aerosol Injector Ring for Uniform Cleanroom Testing

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Solution Overview

Problem

Current roomside replaceable filter units in cleanrooms require large quantities of aerosol for testing, leading to inefficiency and unnecessary loading of filters, which reduces availability and increases waste, as aerosol distribution is not uniform and requires time to stabilize.

Innovation Solution

Integration of an aerosol injector ring within the fan filter unit allows for direct aerosol challenge upstream of the fan module, reducing the amount of aerosol needed and ensuring uniform distribution, enabling individual filter testing without affecting adjacent filters, thus optimizing resource use and reducing downtime.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If aerosol challenge is provided to a common plenum feeding multiple filters, then uniform aerosol concentration can be achieved for testing, but large quantities of aerosol are wasted and adjacent filters are unnecessarily loaded

Engineering Contradiction:
Improveaerosol concentration uniformityVSAvoidaerosol waste
Core Design Contradiction:
Measurement precisionVSLoss of substance

Solution Approach 1:

The patent introduces separate aerosol injection ports for each individual filter unit within the common plenum system. This segmentation allows aerosol to be injected directly at each filter location rather than distributing aerosol throughout the entire plenum, thereby achieving uniform concentration at each test point while minimizing overall aerosol consumption and preventing unnecessary loading of adjacent filters.

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If large quantities of aerosol are provided to charge the plenum, then sufficient uniform concentration is achieved for testing, but the time required to stabilize aerosol concentration increases

Engineering Contradiction:
Improveaerosol concentration uniformityVSAvoidaerosol stabilization time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent implements preliminary aerosol injection directly at each filter unit's injection port before the actual filtration efficiency test begins. This preliminary action pre-charges the immediate testing zone with aerosol, eliminating the need to wait for the entire plenum to reach stable concentration, thereby significantly reducing the time required to achieve test-ready conditions.

Inventive Principle:
Principle #10Preliminary action

3Reliability

If aerosol is distributed throughout the common plenum, then all filters receive aerosol challenge, but adjacent filters are unnecessarily loaded reducing system availability

Engineering Contradiction:
Improvefilter performance certificationVSAvoidcleanroom availability
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent provides aerosol challenge locally at each individual filter unit through dedicated injection ports positioned adjacent to each filter. This local quality approach ensures that aerosol is applied only where needed for testing, preventing unnecessary loading of adjacent filters that are not undergoing testing, thereby maintaining higher system availability and productivity.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution significantly reduces aerosol usage, enhances testing efficiency, and maintains filter performance by ensuring uniform aerosol distribution, allowing for accurate and timely certification of filters without disrupting normal cleanroom operations.

Implementation Method 1

an aerosol challenge is provided at a location adjacent and upstream of the fan module

Methodology Applied
Scientific EffectAerosol: Aerosol

Implementation Method 2

Air is then pulled into a housing of the replaceable fan filter unit and out through the replacement filter to the roomside by a fan module

Methodology Applied
Scientific EffectFan: Fan

Data Source

PatentUS9352261B2Roomside replaceable fan filter unit
Publication Date: 2016.05.31 CAMFIL USA INC
  • US9352261B2 patent drawing
  • US9352261B2 patent drawing
  • US9352261B2 patent drawing

AI summary

Embodiments described herein relate to a method for utilizing a roomside replaceable fan filter unit having an integral aerosol injector ring. The method begins by replacing a used filter from the fan filter unit with a replacement filter from a roomside of the fan filter unit. Air is then pulled into a housing of the replaceable fan filter unit and out through the replacement filter to the roomside by a fan module. Finally, an aerosol challenge is provided at a location adjacent and upstream of the fan module.