Fan Filter Unit Heater with Composite Mesh Thermal Management
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing systems face challenges with space requirements due to separate hot air generators, leading to temperature variations in hot air supplied to substrate processing apparatuses, and the fan filter unit's heat transmission causing filter degradation and reduced dust collecting performance.
Innovation Solution
A fan filter unit configuration with a flat heater, aluminum meshes for high heat conductivity, stainless meshes for low heat conductivity, and glass fiber meshes to prevent heat transfer to the filter, ensuring uniform air heating and maintaining filter performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a separate hot air generator is provided to supply hot air to substrate processing apparatus, then hot air can be generated and supplied, but the system requires large installation space and causes temperature variations in supplied hot air
Solution Approach 1:
The patent combines the hot air generator (including heater and fan) with the substrate processing apparatus into an integrated unit. The heater is installed within the processing chamber, and the fan is positioned to directly circulate air within the same space, eliminating the need for separate external hot air generation equipment and long air ducts, thereby reducing installation space and ensuring uniform temperature distribution.
Solution Approach 2:
The heating function is segmented into multiple heating elements distributed within the processing chamber rather than a single centralized heater. This segmentation allows heat to be generated at multiple locations simultaneously, improving temperature uniformity across the chamber while maintaining a compact integrated design.
2Productivity
If the heater is installed in the fan filter unit to generate hot air, then hot air can be supplied directly, but heat is transmitted to the filter causing degradation and reduced dust collecting performance
Solution Approach 1:
The patent introduces heat-resistant mesh members as intermediary components positioned between the heater and the filter. These mesh members act as thermal barriers that block heat transmission from the heater to the filter, protecting the filter from thermal degradation while allowing the heater to maintain high operating temperatures for efficient hot air generation.
Solution Approach 2:
The heat-resistant mesh members function as thin film barriers that selectively block thermal energy while maintaining air permeability. These mesh structures allow air flow to pass through while preventing heat conduction to the filter, thus protecting filter integrity without compromising hot air generation efficiency.
3Device complexity
If the heater is installed in the fan filter unit, then hot air generation is integrated, but heat transmission deforms the filter and lowers dust collecting performance
Solution Approach 1:
Heat-resistant mesh members are installed as intermediary protective layers between the heater and the filter within the integrated fan filter unit. These mesh members specifically block heat transmission paths while maintaining the compact integrated structure, preventing filter deformation and preserving dust collecting performance.
Solution Approach 2:
The patent employs composite protective structures consisting of heat-resistant mesh materials positioned between the heater and filter. These composite arrangements combine the thermal resistance properties of the mesh materials with the structural integrity of the filter, creating a protective barrier that maintains both system integration and filter functionality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration stabilizes substrate processing performance by providing uniform air temperature, preventing filter degradation, and reducing energy consumption while maintaining efficient dust collection.
Implementation Method 1
a heater (22) arranged in a flat shape
Implementation Method 2
a first mesh body (23) formed in a mesh shape using a material with high heat conductivity
Implementation Method 3
a second mesh body (24) formed in a mesh shape using a material with lower heat conductivity than the first mesh body (23) and arranged to face a surface of the first mesh body (23) opposite to a surface of the first mesh body (23) facing the flat heater (22)
Data Source
AI summary
A heater unit according to an embodiment includes: a flat heater including a linear heating element arranged in a planar pattern; a first mesh body formed in a mesh pattern using a material with high heat conductivity and placed at least on one side of the flat heater facing the flat heater; and a second mesh body formed in a mesh pattern using a material with lower heat conductivity than that of the first mesh body and placed to face a surface of the first mesh body opposite to the surface of the first mesh body facing the flat heater.