Fan Filter Interface Module With Radiator Gas Cooling
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Solution Overview
Problem
The interface module experiences temperature increases when conveying or storing substrates at high temperatures, which can lead to damage and affect the cooling capacity of substrates.
Innovation Solution
The interface module incorporates a fan filter unit with a radiator placed between the fan and the filter, a gas supply system, and a circulation duct to cool and circulate gases, reducing temperature increases by utilizing a radiator to cool gases before they enter the housing and efficiently discharging heated gases.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If substrates at high temperature are conveyed or stored in the interface module, then substrate processing capability is improved, but temperature inside the interface module increases
Solution Approach 1:
The patent extracts the high-temperature substrate handling function into a dedicated substrate support instrument with independent heating/cooling capability, while the main interface module maintains a controlled temperature environment through the cooling system with radiator and circulation duct
Solution Approach 2:
The patent introduces a cooling system with radiator and circulation duct as an intermediary between the high-temperature substrate processing function and the main interface module environment, allowing heat transfer from substrates while maintaining overall temperature control
2Temperature
If cooling system is added to reduce temperature increase, then temperature control is improved, but device complexity increases
Solution Approach 1:
The fan filter unit is designed to serve multiple functions: air filtration, cooling air circulation, and heat dissipation through the integrated radiator, reducing the need for separate dedicated cooling components
Solution Approach 2:
The patent merges the cooling system components (fan, filter, radiator, circulation duct) into an integrated assembly that combines filtration and cooling functions in a unified structure, simplifying the overall device architecture
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively reduces temperature increases within the interface module, maintaining substrate cooling capacity and preventing damage to components with low heat resistance, such as those handling substrates at 200°C or higher.
Implementation Method 1
a radiator provided between the fan and the filter
Implementation Method 2
a fan filter unit including a fan and a filter... a circulation duct connected to the housing and the upper housing
Implementation Method 3
a fan filter unit including a fan and a filter... a circulation duct connected to the housing and the upper housing
Implementation Method 4
a fan filter unit including a fan and a filter
Data Source
AI summary
Examples of an interface module include a fan filter unit including a fan and a filter, a housing surrounding a space adjacent to the filter, a discharge system attached to the housing, a substrate support instrument provided in the housing, an upper housing surrounding a space adjacent to the fan, a gas supply system attached to the upper housing, a circulation duct connected to the housing and the upper housing, and a radiator provided between the fan and the filter.