Fan Filter Unit Ventilation for Substrate Containers
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Solution Overview
Problem
Conventional substrate processing methods incur high costs due to increased ventilation flow rates needed to maintain substrate purity, leading to increased running costs and potential contamination during transfer processes.
Innovation Solution
The method involves using a container with a fan filter unit and a lid that adjusts its open and closed states during storage and transfer, optimizing ventilation flow rates to prevent dust attachment and outside air entry, while allowing substrate transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If ventilation is performed with the fan filter unit when the container is stored in the storage shelf and transferred, then dust present inside the container is prevented from attaching to substrates and outside air is prevented from entering, but the ventilation flow rate is increased and ventilation continues for a long period, increasing running costs
Solution Approach 1:
The fan filter unit operates periodically rather than continuously. It runs during container transfer operations and stops when containers are stored in the storage shelf, reducing energy consumption while maintaining substrate purity during critical operations.
Solution Approach 2:
The ventilation system dynamically adjusts its operation based on the container's state and position. The fan filter unit is activated during transfer and deactivated during storage, making the system adaptive to operational requirements rather than maintaining constant high flow rate.
2Object-affected harmful factors
If the fan filter unit operates at high ventilation flow rate to prevent back flow of outside air, then outside air is prevented from entering the container, but the running cost increases
Solution Approach 1:
High flow rate ventilation is applied periodically only when necessary during container transfer operations, and stopped during storage periods, reducing overall energy consumption while maintaining protection during critical phases.
Solution Approach 2:
The ventilation flow rate parameter is changed based on operational requirements - high flow rate during transfer operations to prevent outside air intrusion, and zero flow rate during storage, optimizing energy usage.
3Use of energy by moving object
If ventilation is stopped when substrates are transferred in the substrate loading/unloading section, then energy consumption is reduced, but clean air in the substrate transfer area enters inside the container with dust
Solution Approach 1:
The fan filter unit is activated periodically during substrate transfer operations in the loading/unloading section to maintain positive pressure and prevent dust entry, then stopped when not needed, balancing energy consumption with contamination prevention.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces operational costs by optimizing ventilation flow rates and maintaining substrate purity during storage and transfer, preventing contamination and maintaining substrate cleanliness.
Implementation Method 1
causes movement of air from the second opening toward the first opening
Data Source
AI summary
A method for processing substrates for a substrate processing facility includes the steps of: performing ventilation of a container with a fan filter unit while a lid of the container is in a closed state, when the container is stored in a storage shelf, and when the container is transferred with a substrate transfer device, and ventilating the container with the fan filter with the lid of the container in an open state, when substrates are transferred in a substrate loading/unloading section with the substrate transfer device.