Fan-Out Package Wall Structure for EMI Shielding and Thermal Dissipation

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Solution Overview

Problem

Integrated fan-out packages face challenges in preventing electromagnetic interference (EMI) that can disrupt the operation of dies, necessitating effective shielding mechanisms within the system.

Innovation Solution

A wall structure with an inner and outer surface is formed around the dies using a three-dimensional printing process, incorporating a framed and staggered portion with through channels for encapsulant flow, and conductive structures for EMI shielding, which also serves as a thermal dissipation structure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a wall structure is formed around the dies to provide EMI shielding, then electromagnetic interference protection is improved, but the package area and complexity increase

Engineering Contradiction:
Improveelectromagnetic interference protectionVSAvoidpackage structure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent combines multiple functions into a single integrated wall structure: EMI shielding through conductive materials, thermal dissipation through heat conduction paths, and structural support through the encapsulant-containing design. This merging approach provides comprehensive protection without proportionally increasing package complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The wall structure serves multiple purposes simultaneously: it acts as an EMI shield, a thermal management component, and a mechanical support structure. The conductive material provides both electromagnetic shielding and heat conduction, while the encapsulant-filled structure offers both structural integrity and environmental protection.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Productivity

If the minimum feature size is reduced to increase integration density, then the number of components per area is improved, but the manufacturing precision requirements worsen

Engineering Contradiction:
Improveintegration densityVSAvoidminimum feature size control
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent changes the material parameter by using conductive materials with specific electromagnetic shielding properties and thermal conductivity. This allows the wall structure to provide EMI protection and thermal management at reduced feature sizes without sacrificing functional performance, thereby enabling higher integration density while maintaining manufacturing feasibility.

Inventive Principle:
Principle #35Parameter changes

3Object-affected harmful factors

If conductive structures are added for EMI shielding, then electromagnetic protection is improved, but the thermal management capability worsens due to potential heat accumulation

Engineering Contradiction:
Improveelectromagnetic interference protectionVSAvoidthermal dissipation
Core Design Contradiction:
Object-affected harmful factorsVSTemperature

Solution Approach 1:

The patent employs composite material strategy by combining conductive materials for EMI shielding with thermally conductive materials for heat dissipation. The wall structure integrates materials that simultaneously provide electromagnetic shielding and efficient thermal conduction, ensuring that heat generated by the dies is effectively managed even with the addition of conductive shielding structures.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively shields against electromagnetic interference and enhances the reliability of the package by ensuring reliable encapsulation and thermal management, thereby maintaining the integrity of the dies' operation.

Implementation Method 1

A wall structure with an inner and outer surface is formed around the dies using a three-dimensional printing process

Methodology Applied
Scientific Effect3D Printing: 3D Printing

Implementation Method 2

conductive structures for EMI shielding

Methodology Applied
Scientific EffectElectromagnetic shielding: Faraday Cage

Implementation Method 3

which also serves as a thermal dissipation structure

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS10937742B2Package and manufacturing method thereof
Publication Date: 2021.03.02 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US10937742B2 patent drawing
  • US10937742B2 patent drawing
  • US10937742B2 patent drawing

AI summary

A package includes a plurality of dies, a wall structure, an encapsulant, and a redistribution structure. The wall structure surrounds at least one of the dies. The encapsulant includes a first portion, a second portion, and a third portion. The first portion is encircled by the wall structure. The second portion encircles the wall structure. The third portion connects the first portion and the second portion. The redistribution structure is disposed on the encapsulant and is electrically connected to the dies and the wall structure.