Fan-out Structure Orthogonal Segmentation
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Solution Overview
Problem
Conventional fan-out structures in semiconductor techniques face defects due to slant fan-out lines, making it difficult to distinguish between manufacturing and design faults, and require excessive horizontal space for symmetrically arranged welding pads.
Innovation Solution
A fan-out structure comprising a welding pad, a welding pad extension member, and a fan-out line with an L-shaped or T-shaped connection line configuration, where the fan-out line is perpendicular to the welding pad extension direction, allowing for horizontal or vertical elicitation and enabling tracing of defects to manufacturing or design issues, and optimizing pad arrangement for reduced space usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If slant fan-out lines are used in conventional fan-out structures, then the fan-out line can be connected to the welding pad, but the slant fan-out line is susceptible to defects and attenuates neighboring lines
Solution Approach 1:
The fan-out line is divided into multiple segments: the first fan-out line extends from the welding pad in a first direction, the second fan-out line extends from the first fan-out line in a second direction perpendicular to the first direction. This segmentation transforms the problematic slant line into orthogonal segments, reducing defect susceptibility and eliminating attenuation effects on neighboring lines.
Solution Approach 2:
The patent transitions from a single-direction slant fan-out line to a two-dimensional orthogonal fan-out structure. The first fan-out line extends in a first direction while the second fan-out line extends in a second direction perpendicular to the first direction, utilizing multiple spatial dimensions to resolve the technical contradictions.
2Stability of the object's composition
If multiple welding pads are symmetrically arranged in conventional fan-out structures, then the structure is balanced, but excessive space is required in the horizontal direction
Solution Approach 1:
The patent employs asymmetric arrangement of welding pads along with the orthogonal fan-out line structure. Instead of requiring symmetric horizontal arrangement, the fan-out lines extend in perpendicular directions from each welding pad, achieving structural balance through asymmetric spatial utilization that reduces overall horizontal space requirements.
3Reliability
If slant fan-out lines are used in conventional fan-out structures, then the fan-out function is achieved, but it is difficult to trace whether a defect is a result of manufacturing issue or design fault
Solution Approach 1:
The fan-out structure is segmented into distinct orthogonal segments (first fan-out line and second fan-out line extending in perpendicular directions). This segmentation creates clear boundaries and distinct geometric features that facilitate systematic defect tracing, allowing identification of whether defects originate from manufacturing processes or design faults through structured inspection of each segment.
Data Source
AI summary
A fan-out structure and its manufacturing method are presented, relating to semiconductor techniques. The fan-out structure includes a welding pad; a welding pad extension member contacting the welding pad; and a fan-out line contacting the welding pad extension member, with an elicitation direction of the fan-out line perpendicular to an extension direction of the welding pad. This fan-out structure allows the fan-out line to be horizontally or vertically elicited from the welding pad, and thus remedies the drawbacks associated with an aslant-elicited fan-out line in conventional fan-out structures.