Fan-Enhanced Packed Tower for Semiconductor Effluent Backpressure Reduction
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Solution Overview
Problem
Existing packed towers in the semiconductor and flat panel display manufacturing industry have sub-optimal performance in treating effluent gas streams, leading to inefficient particle removal and increased backpressure on manufacturing tools.
Innovation Solution
A packed tower design incorporating a fan, such as a combined mass-flow and centrifugal separator fan, to propel the effluent stream and separate particles, reducing backpressure and improving particle removal efficiency by creating a negative pressure difference and using a centrifugal impeller to convey the stream and particles through the tower.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional packed tower is used to treat effluent gas streams, then particle removal is performed, but backpressure on manufacturing tools increases and treatment efficiency decreases
Solution Approach 1:
The patent applies the dynamics principle by introducing a fan to create dynamic airflow movement through the packed tower. The fan generates a negative pressure difference that actively draws effluent gas through the packed bed, creating controlled turbulent flow that enhances particle removal efficiency while managing backpressure conditions dynamically rather than relying on passive flow
2Productivity
If a fan is added to propel effluent stream and remove particles, then particle removal efficiency improves and backpressure reduces, but device complexity increases
Solution Approach 1:
The fan in the patent serves multiple functions simultaneously: it propels the effluent stream through the packed tower, creates negative pressure to reduce backpressure on manufacturing tools, and generates centrifugal force for particle separation. This multi-functionality reduces the need for additional separate components, thereby limiting the increase in device complexity while achieving multiple performance improvements
Solution Approach 2:
The patent utilizes pneumatic principles by employing a fan to create pressure differentials and airflow patterns that drive the treatment process. The fan generates a negative pressure zone that draws gas through the packed bed and uses centrifugal pneumatic forces to separate particles from the gas stream, replacing what would otherwise require complex mechanical separation systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The fan-enhanced packed tower improves the flow of effluent streams and enhances particle removal from the gas streams, reducing backpressure on upstream tools and increasing the efficiency of the treatment process.
Implementation Method 1
The fan may be configured to generate a negative pressure to draw the effluent stream into the packed tower and through the packed substrate
Implementation Method 2
a combined mass-flow and centrifugal separator fan... using a centrifugal impeller to convey the stream and particles through the tower
Data Source
AI summary
A packed tower includes a packed tower housing having an inlet for receiving an effluent stream; an outlet for venting the effluent stream; a packed substrate housed within the packed tower housing between the inlet and the outlet, the packed substrate being configured to entrain at least some of particles from a fluid as the effluent stream flows therethrough; and a fan housed within the packed tower housing, the fan being configured to propel the effluent stream from the inlet towards the outlet and to remove at least some of the particles from the fluid. The fan helps to generate a negative pressure to draw the effluent stream into the packed tower and through the packed substrate, which reduces the back pressure improves the flow of effluent stream through the packed tower and upstream abatement apparatus and helps to improve the removal of particles from within the effluent stream.