Faraday Shielding Plate with Integrated Resistance Wire for Plasma Etching
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Solution Overview
Problem
Existing plasma etching systems face issues with low heating efficiency and structural complexity due to scattered heat delivery, which can cause sputtering damage to dielectric windows and increase the risk of electrical component damage, while also requiring manual cleaning to remove product deposition.
Innovation Solution
A Faraday shielding apparatus with a conductive ring and petal-shaped members, featuring a resistance wire with an insulating and thermally conductive layer, is used to directly heat the dielectric window, incorporating a heating circuit and feedback control system to maintain optimal temperature and reduce deposition, thereby enhancing heating efficiency and simplifying the equipment structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a heating net and heat supplying fan are used to heat the dielectric window, then the dielectric window can be heated to reduce deposition, but the heating efficiency is low and the structure becomes complex
Solution Approach 1:
The patent extracts the heating function from the complex heating net and fan system, and integrates it directly into the Faraday shielding plate by embedding resistance wires. This eliminates the need for separate heating components while maintaining the heating function, thus reducing structural complexity and improving heating efficiency.
Solution Approach 2:
The patent merges the heating function with the Faraday shielding plate by integrating resistance wires into the shielding plate structure. This combination allows the shielding plate to serve dual purposes: electromagnetic shielding and localized heating, thereby simplifying the overall system structure and reducing the number of components.
2Temperature
If a heating net and fan are used to deliver heat, then the dielectric window can be heated, but the heat is scattered and heating efficiency is low
Solution Approach 1:
The patent applies local quality by positioning resistance wires directly on the Faraday shielding plate at locations where heat is most needed. This localized heating approach ensures that thermal energy is delivered precisely to the dielectric window surface, minimizing heat scattering and reducing energy loss compared to distributed heating methods.
Solution Approach 2:
The Faraday shielding plate acts as an intermediary that transfers heat directly from the resistance wires to the dielectric window. This direct thermal coupling through the shielding plate eliminates the need for convective heat transfer via fan-blown air, significantly reducing heat loss and improving heating efficiency.
3Loss of energy
If external shielding cover is added to prevent heat dispersion, then heat loss is reduced, but the structure becomes more complex and occupies additional space
Solution Approach 1:
The Faraday shielding plate performs multiple functions simultaneously: it provides electromagnetic shielding, serves as a heat transfer medium, and acts as a structural support. This multi-functionality eliminates the need for separate external shielding covers, as the shielding plate itself is integrated into the chamber structure and provides both shielding and controlled heating functions.
4Loss of substance
If heating is applied to reduce deposition on dielectric window, then deposition amount decreases, but electrical components may be damaged due to high temperature
Solution Approach 1:
The resistance wires are positioned on specific regions of the Faraday shielding plate that directly face the dielectric window, creating localized heating zones. This ensures that heat is applied precisely where needed to reduce deposition, while surrounding electrical components remain at safe temperatures, thus maintaining component reliability.
Solution Approach 2:
The Faraday shielding plate serves as a thermal intermediary that controls heat distribution. It conducts heat from the resistance wires to the dielectric window while providing thermal isolation from surrounding electrical components, preventing overheating and damage to sensitive electronics.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves high heating efficiency with reduced heat loss and simplified structure, minimizing deposition on the dielectric window and preventing electrical component damage, while allowing for automated cleaning processes.
Implementation Method 1
the resistance wire is energized and heated during an etching process
Implementation Method 2
the outer surface of the resistance wire is provided with an insulating and thermally conductive layer
Implementation Method 3
a Faraday shielding plate, the Faraday shielding plate includes a conductive ring and a plurality of conductive petal-shaped members radially and symmetrically connected to the outer periphery of the conductive ring
Data Source
AI summary
A Faraday shielding apparatus includes a Faraday shielding plate and a resistance wire attached to the lower end of the Faraday shielding plate; the Faraday shielding plate includes a conductive ring and a plurality of conductive petal-shaped members radially symmetrically connected to the outer periphery of the conductive ring; and an insulating and thermally conductivity layer is on the outer surface of the resistance wire. During the etching process, the heating circuit and the resistance wire are conductively connected, increasing the temperature of the resistance wire when it is energized. The Faraday shielding plate is between a radio frequency coil and the resistance wire to form a shield. The output terminal of the heating power supply is filtered by way of a filter circuit unit, then is connected to the resistance wire, preventing coupling between the radio frequency coil and the resistance wire.