Fe-Pt Sputtering Target with SiO2 and BN

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Solution Overview

Problem

The challenge is to develop a high-density sintered compact for a Fe—Pt based sputtering target that incorporates hexagonal BN as a non-magnetic material, as traditional methods result in low density and poor sinterability, leading to defects such as cracks and increased particle generation during sputtering.

Innovation Solution

Incorporating SiO2 with hexagonal BN in a Fe—Pt based sintered compact, where Si and O are present in regions where B or N are found, improves sinterability and density, reducing microcrack formation and particle generation by optimizing the X-ray diffraction peak intensity ratios and content of non-magnetic materials.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If hexagonal BN is used as a non-magnetic material in Fe—Pt based sintered compact, then magnetic insulation properties are improved, but sinterability deteriorates and density decreases

Engineering Contradiction:

Improvemagnetic insulation propertiesVSAvoidsinterability

Core Design Contradiction:

ReliabilityVSEase of manufacture

Solution Approach 1:

SiO2 is introduced as an intermediary material between Fe—Pt magnetic phase and hexagonal BN non-magnetic phase. The SiO2 improves sinterability and promotes densification during sintering process, while hexagonal BN maintains magnetic insulation properties. This intermediary approach allows combining materials with conflicting sintering characteristics to achieve both good sinterability and magnetic insulation.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention creates a composite sintered compact containing Fe—Pt magnetic phase, hexagonal BN non-magnetic phase, and SiO2 auxiliary phase. This composite structure combines the magnetic insulation properties of hexagonal BN with the sintering促进作用 of SiO2, resolving the contradiction between magnetic insulation and sinterability.

Inventive Principle:

Principle #40Composite materials

2Reliability

If hexagonal BN is used as a non-magnetic material in Fe—Pt based sintered compact, then magnetic insulation properties are improved, but density decreases leading to defects

Engineering Contradiction:

Improvemagnetic insulation propertiesVSAvoiddensity

Core Design Contradiction:

ReliabilityVSVolume of stationary object

Solution Approach 1:

SiO2 acts as a mediator that promotes densification during sintering. It facilitates mass transport and filling of voids, increasing overall density while hexagonal BN maintains magnetic insulation. The SiO2 content is controlled to balance density improvement with magnetic insulation properties.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention optimizes the content ratio of hexagonal BN and SiO2, as well as sintering parameters (temperature, time, atmosphere), to achieve high density while maintaining magnetic insulation. By controlling these parameters, the compact achieves high density without compromising the magnetic insulation provided by hexagonal BN.

Inventive Principle:

Principle #35Parameter changes

3Device complexity

If traditional sintering methods are used for Fe—Pt based compact with hexagonal BN, then manufacturing process is simple, but microcracks and particle generation occur

Engineering Contradiction:

Improvemanufacturing process complexityVSAvoiddefect rate

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

SiO2 serves as a buffer and stress-distributing phase that prevents microcrack formation during sintering and subsequent processing. It absorbs thermal stress and mechanical stress, reducing defect formation while maintaining a relatively simple manufacturing process.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The SiO2 phase is incorporated beforehand to cushion against potential defects. It pre-compensates for thermal expansion differences and stress concentrations that would otherwise lead to microcracks and particle generation during sintering and processing.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The resulting high-density sputtering target significantly reduces particle generation during sputtering, enhancing the deposition yield and magnetic insulation properties of the thin film.

Implementation Method 1

a Fe—Pt based magnetic material sintered compact, comprising hexagonal BN and SiO2 as non-magnetic materials

Methodology Applied

Scientific EffectSintering: Sintering

Implementation Method 2

Si and O are present in a region where B or N is present at a cut surface of the sintered compact

Methodology Applied

Scientific EffectSolid solution formation: Solid Solution Strengthening

Implementation Method 3

optimizing the X-ray diffraction peak intensity ratios and content of non-magnetic materials

Methodology Applied

Scientific EffectX-ray diffraction: X-Ray

Implementation Method 4

a Fe—Pt based magnetic material sintered compact used in manufacture of a magnetic thin film

Methodology Applied

Scientific EffectSputtering: Sputtering

Data Source

PatentUS10937455B2Fe—Pt based magnetic material sintered compact

Publication Date: 2021.03.02 JX NIPPON MINING & METALS CORP

AI summary

Provided is an Fe—Pt based magnetic material sintered compact, comprising BN and SiO2 as non-magnetic materials, wherein Si and O are present in a region where B or N is present at a cut surface of the sintered compact. A high density sputtering target is provided which enables production of a magnetic thin film for heat-assisted magnetic recording media, and also reduces the amount of particles generated during sputtering.