Fe-Pt Sputtering Target Composition for Low-Particle Magnetic Thin Films
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Solution Overview
Problem
Conventional sputtering targets with a nonmagnetic phase dispersed in a magnetic phase face issues with particle generation during the sputtering process, particularly due to the aggregation of components like carbon and metal oxides, which can lead to abnormal discharges and reduced recording density in magnetic recording media.
Innovation Solution
Incorporating low-viscosity oxides such as FeO, Fe3O4, K2O, Na2O, and ZnO into the sputtering target composition to enhance adhesion between the magnetic and nonmagnetic phases, thereby reducing particle generation and improving the yield of the magnetic recording medium.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a nonmagnetic phase is dispersed in a magnetic phase to form granular structured-type magnetic thin film, then recording density is improved and noise is reduced, but particles are generated during the sputtering process due to aggregation of nonmagnetic components
Solution Approach 1:
The patent applies preliminary action by pre-mixing the nonmagnetic phase components (carbon, boron, metal oxides) with the magnetic phase (Fe-Pt alloy) before sputtering deposition. This pre-mixing ensures uniform distribution of nonmagnetic particles throughout the magnetic layer, preventing aggregation during the sputtering process and reducing particle generation while maintaining the granular structure necessary for high recording density
Solution Approach 2:
The patent uses composite materials by creating a granular structured-type magnetic thin film that combines magnetic Fe-Pt alloy phases with nonmagnetic phases (carbon, boron, metal oxides). This composite structure provides both the magnetic properties needed for recording and the physical separation of magnetic grains, while the controlled distribution prevents harmful particle aggregation during deposition
2Reliability
If carbon and metal oxides are used as nonmagnetic materials to surround magnetic grains, then magnetic interaction between grains is reduced, but abnormal discharge occurs and particles drop off from the sputter surface
Solution Approach 1:
The patent introduces an intermediary approach by carefully selecting and combining multiple nonmagnetic materials (carbon, boron, and metal oxides) that work together to surround magnetic grains. This composite nonmagnetic phase acts as an effective intermediary that provides magnetic grain isolation while maintaining stability during sputtering, preventing both abnormal discharge and particle drop-off by distributing stress and preventing aggregation
3Productivity
If conventional sputtering targets are used to deposit magnetic recording layer, then deposition is achieved, but particles adhere to the substrate reducing yield
Solution Approach 1:
The patent applies preliminary action by pre-mixing all target components (magnetic Fe-Pt alloy and nonmagnetic carbon, boron, metal oxides) in the desired proportions before sputtering. This ensures that particles are deposited uniformly and adhered properly to the substrate in the correct locations, rather than forming loose aggregates that would flake off and reduce yield, thus maintaining high deposition efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The addition of low-viscosity oxides significantly decreases particle formation during the sputtering process, allowing for the deposition of a high-quality magnetic recording layer and improving device characteristics by enhancing the adhesion and dispersibility of the nonmagnetic phase around magnetic grains.
Implementation Method 1
This kind of granular structured-type magnetic thin film is prepared by sputtering a target, which has a structure in which a nonmagnetic phase is dispersed in a magnetic phase, on a substrate by using a magnetron sputtering device.
Data Source
AI summary
Provided is a sputtering target or a film which is characterized by containing 0.1 to 10 mol % of an oxide of one or more types selected from FeO, Fe3O4, K2O, Na2O, PbO, and ZnO, 5 to 70 mol % of Pt, and the remainder being Fe. The present invention addresses the issue of providing a sputtering target capable of considerably reducing the particles caused by nonmagnetic materials and significantly improving the yield during deposition. It is thereby possible to deposit a quality magnetic recording layer and improve yield of a magnetic recording medium.