Feature Guiding Template for Block Copolymer Self-Assembly
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Solution Overview
Problem
Current lithography techniques face challenges in achieving high-resolution feature formation due to limitations in feature size reduction, particularly in projection photolithography and imprint lithography, where the resolution is constrained by radiation wavelength and numerical aperture, rather than pattern density on the template.
Innovation Solution
The method involves designing a feature guiding template for self-assembly of block copolymers, comprising at least two portions joined by a bottleneck, where the characteristic of the template is determined based on the geometry, specifically the width of the bottleneck and the portions, to optimize the formation of lithography features.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If projection photolithography or imprint lithography is used to reduce feature size, then feature resolution is improved, but the resolution is constrained by radiation wavelength and numerical aperture rather than pattern density
Solution Approach 1:
The patent introduces block copolymer self-assembly as an intermediary process between lithography and final pattern formation. The lithography step creates a guiding template that directs the self-assembly of block copolymers, which then form the final high-resolution patterns. This mediator approach allows the system to overcome the resolution limits of direct lithography by using the thermodynamic self-organization of copolymers to achieve finer features.
Solution Approach 2:
The patent segments the patterning process into two distinct stages: (1) creating a guiding template with relaxed resolution requirements, and (2) using block copolymer self-assembly to generate the final fine-pitch pattern. This segmentation allows each stage to be optimized independently, with the template providing structural guidance and the copolymer providing the final high-resolution features.
2Manufacturing precision
If block copolymer self-assembly is used to increase feature density, then feature resolution is improved, but placement accuracy may deteriorate due to lack of directional control
Solution Approach 1:
The patent applies preliminary action by creating a guiding template structure before the block copolymer self-assembly process. This template is formed with specific geometric features (such as trenches, holes, or patterns) that pre-determine the locations and orientations where block copolymer domains will assemble. This preliminary structural guidance ensures that the self-assembly process produces patterns with both high resolution and accurate placement.
Solution Approach 2:
The guiding template exhibits local quality variations with different regions having different properties (e.g., hydrophobic/hydrophilic regions, different geometries, varying depths). These localized variations in the template structure direct the block copolymer self-assembly to specific locations with specific orientations, providing both resolution and placement control through spatially varying template characteristics.
3Manufacturing precision
If the guiding template geometry is optimized for self-assembly, then feature formation quality is improved, but template design complexity increases
Solution Approach 1:
The patent optimizes template geometry by systematically varying key parameters such as feature size, spacing, depth, and shape to achieve desired self-assembly outcomes. By establishing quantitative relationships between template parameters and resulting pattern quality, the design process becomes more predictable and manageable, reducing the effective complexity despite the detailed geometric optimization required.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the creation of high-resolution patterns with reduced placement errors, allowing for smaller feature sizes and increased feature density on substrates, thereby improving the manufacturing efficiency and cost-effectiveness in electronic device production.
Implementation Method 1
it may undergo an order-disorder transition on cooling below a certain temperature (order-disorder transition temperature To/d) resulting in phase separation of copolymer blocks
Implementation Method 2
The use of self-assembly of a block copolymer (BCP) has been considered as a potential method for increasing the feature resolution
Data Source
AI summary
A method of designing a feature guiding template for guiding self-assembly of block copolymer to form at least two features in a design layout for lithography, the feature guiding template including at least two portions joined by a bottleneck, the method including determining a characteristic of the feature guiding template based on at least a function of geometry of the feature guiding template including a value of a first width of at least one of the portions, a value of a second width of the bottleneck, or a value based on both the first width and the second width.