Feeder Member Cu Insert Structure for Strong Mo-Cu Joining
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Solution Overview
Problem
The existing feeder members for semiconductor manufacturing apparatuses, which use Mo and Cu for electrode-side terminals and cables, face issues with insufficient joining strength due to the lack of alloy formation and potential pore formation at the interface, leading to reduced durability and risk of damage.
Innovation Solution
A feeder member design featuring an electrode-side terminal made of high-melting-point metal, directly joined to a Cu-containing insert and connector, with the cable also made of Cu, eliminating the need for brazing materials and ensuring strong connections between Cu-containing components, thereby enhancing the structural integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If electrode-beam welding or laser-beam welding is used to join Mo electrode-side terminal and Cu cable, then the joining process is simple and direct, but the joining strength is insufficient due to lack of alloy formation and potential pore formation at the interface
Solution Approach 1:
The patent introduces an insert made of Cu-containing material as an intermediary component between the Mo electrode-side terminal and the Cu cable. This insert facilitates direct joining without brazing materials while ensuring sufficient joining strength through direct contact and bonding between compatible materials, thereby resolving the contradiction between manufacturing simplicity and joining strength.
2Strength
If brazing material is used to join Mo electrode-side terminal and Cu cable, then the joining strength may be improved, but the device complexity increases and additional materials are required
Solution Approach 1:
The patent extracts and eliminates the brazing material from the joining process. By using a Cu-containing insert as an intermediary, the design achieves strong joining between Mo and Cu components without requiring additional brazing materials, thus reducing device complexity while maintaining or improving joining strength.
3Ease of manufacture
If direct welding is used between Mo and Cu, then the manufacturing process is simplified, but the reliability is reduced due to pore formation and insufficient alloy formation at the interface
Solution Approach 1:
The Cu-containing insert serves as a mediator that improves reliability by preventing pore formation and ensuring proper alloy formation at the Mo-Cu interface. This intermediary component maintains manufacturing simplicity while significantly enhancing the reliability of the electrical connection.
4Device complexity
If Mo and Cu are directly joined without intermediary, then the structure is simple, but the durability is reduced due to thermal expansion differences and interface weaknesses
Solution Approach 1:
The Cu-containing insert acts as a mediator that accommodates thermal expansion differences between Mo and Cu, thereby improving durability. This intermediary component absorbs thermal stresses and prevents interface failure during repeated heating and cooling cycles, extending the service life of the feeder member.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design achieves a significant increase in rupture strength, up to four times that of comparative forms, by ensuring strong joinings between Cu-containing members, allowing for reliable operation even at high temperatures without interface gaps or pores.
Implementation Method 1
the joined portion of the insert made of a Cu containing material is directly joined without using a brazing material to the electrode-side terminal made of a high-melting-point metal containing material
Implementation Method 2
One end of the cable made of a Cu containing material is joined with the one end being inserted in the hole portion of the insert, and the other end of the cable is joined with the other end being inserted in the recessed portion of the connector
Data Source
AI summary
A feeder member includes an electrode-side terminal, an insert, a connector, and a cable. The electrode-side terminal is made of a high-melting-point metal containing material, and is joined to an electrode embedded in a ceramic base. Each of the insert, the connector and the cable is made of a Cu containing material. The insert has a joined portion that is directly joined to the electrode-side terminal without using a brazing material, and a hole portion that is provided on a side opposite to the joined portion. The connector has a socket portion that is electrically connected to a conductive member differing from the feeder member, and a recessed portion that is provided on a side opposite to the socket portion. The cable has one end joined to the hole portion of the insert, and the other end joined to the recessed portion of the connector.