Feedforward Vibration Isolation for Reconfigurable Motion Stages

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Solution Overview

Problem

Existing motion systems with active vibration isolation and feedforward control are cumbersome to adapt to different motion stage topologies, requiring extensive programming and maintenance of libraries with obsolete entries, making it difficult to support various topologies and necessitating recompilation of programs.

Innovation Solution

A motion system with a hardware and motion control system that includes a feedforward control with a memory for storing string-based motion equations, allowing real-time computation of counteracting forces based on motion stage topology, and a user interface for editing these equations, enabling on-site adaptation to any new topology without the need for pre-compilation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a library of pre-compiled programs is maintained to support different motion stage topologies, then compatibility with various topologies is improved, but device complexity and maintenance burden increase

Engineering Contradiction:
Improvecompatibility with various topologiesVSAvoidmaintenance burden
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent replaces the traditional compiled programming language approach with a string-based configuration system. Instead of compiling C/C++ code into executable programs, the system uses human-readable string parameters that directly define motion stage topology characteristics. This substitution eliminates the compilation step and the need to maintain multiple pre-compiled programs, allowing dynamic adaptation to different topologies through simple parameter changes rather than program recompilation.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If motion equations are recompiled for each topology change, then computation accuracy is improved, but loss of time increases

Engineering Contradiction:
Improvecomputation accuracyVSAvoidrecompilation time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent performs preliminary setup by storing the complete motion equations in string format within the system memory, with all necessary computational logic already prepared and validated. When a topology change occurs, the system simply retrieves and executes the appropriate pre-prepared string configuration rather than performing compilation on-site. This preliminary preparation of computation logic eliminates the time-consuming recompilation step while maintaining full computational accuracy.

Inventive Principle:
Principle #10Preliminary action

3Adaptability or versatility

If multiple programs are stored in the library to support different topologies, then adaptability is improved, but quantity of substance (storage space and maintenance overhead) increases

Engineering Contradiction:
Improvesupport for different topologiesVSAvoidlibrary size
Core Design Contradiction:
Adaptability or versatilityVSQuantity of substance

Solution Approach 1:

The patent creates a universal string-based configuration system that can represent any motion stage topology using a common set of string parameters and motion equations. Instead of requiring separate compiled programs for each topology, a single universal program can adapt to any topology by loading the appropriate string configuration. This multi-functional approach allows one program to serve multiple topology types, dramatically reducing the quantity of programs and storage space required while maintaining full adaptability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentEP4382764A1Motion system with a configurable feedforward control
Publication Date: 2024.06.12 ETEL SA
  • EP4382764A1 patent drawingFigure 1~2
  • EP4382764A1 patent drawingFigure 3~4
  • EP4382764A1 patent drawing

AI summary

The present invention relates to a motion system (10) comprising a motion hardware system (100) and a motion control system (200) configured to control the movement of the motion hardware system (100). The hardware system (100) comprises a motion stage (102), a platform (110) supporting the motion stage (102), and a machine frame (116) resting on a ground surface (300). The platform (110) comprises a base (112) and an active vibration isolation system (114) arranged between the base (112) and the machine frame (116). The active vibration isolation system (114) comprises actuators to provide together at least three degrees-of-freedom (DOF) actuation of the base (12). The motion control system (200) comprises a feedforward control (210) comprising a vibration isolation system controller (230) for controlling the at least three DOF actuation of the active vibration isolation system (114) to compensate, by exerting a counteracting force (F) on the base (112), for expected reactions forces exerted by the motion stage (102) on the base (112) when operating. The feedforward control (210) comprises a memory (224) for storing a string of characters defining the motion equations based on the topology of the motion stage (102), and a processing unit (222) for processing said string of characters to compute said counteracting force (F).