High Voltage Feedthrough Connector Bi-Directional Boundary Surface

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Solution Overview

Problem

The increasing number of components in charged particle apparatuses, such as SEMs and flood columns, leads to space constraints, particularly affecting the high voltage power supply interface, which requires a smaller footprint to accommodate more components within the limited available volume.

Innovation Solution

A new design of high voltage power interface featuring a feedthrough and connector with a bi-directional boundary surface that reduces the required area and volume, utilizing a connector insulator with channels for the feedthrough pin and a feedthrough insulator with protruding pins, ensuring electrical connection while minimizing space usage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the number of components in charged particle apparatuses is increased to improve functionality, then the functional capability is improved, but the available volume is reduced

Engineering Contradiction:
Improvefunctional capabilityVSAvoidavailable volume
Core Design Contradiction:
Adaptability or versatilityVSVolume of stationary object

Solution Approach 1:

The connector insulator is designed with channels that receive and nest the feedthrough pin, allowing the feedthrough to be integrated within the connector structure. This nesting arrangement reduces the overall volume required for the power interface while maintaining all necessary functional components.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The boundary surface is extended bi-directionally in directions parallel to the feedthrough pin axis, utilizing three-dimensional space more efficiently. This dimensional extension allows the creep length requirement to be satisfied without increasing the footprint area, thereby preserving available volume.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Quantity of substance

If the area of the feedthrough on the outer wall is reduced to increase packing density, then the packing density is improved, but the creep length requirement may be compromised

Engineering Contradiction:
Improvepacking densityVSAvoidcreep length requirement
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The boundary surface is extended in the direction parallel to the feedthrough pin axis rather than increasing the radial footprint. This dimensional change allows the creep length to be increased without increasing the area on the outer wall, thereby maintaining packing density while satisfying reliability requirements.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The connector insulator features an asymmetric channel structure that extends the boundary surface bi-directionally along the pin axis. This asymmetric design optimizes the creep path length within a compact footprint, allowing reduced area while maintaining adequate creep length for high voltage isolation.

Inventive Principle:
Principle #4Asymmetry

3Reliability

If a conventional high voltage power interface design is used, then the electrical connection is established, but the required area and volume are larger than necessary

Engineering Contradiction:
Improveelectrical connectionVSAvoidrequired area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The feedthrough pin is received within channels of the connector insulator, nesting the electrical connection components within each other. This arrangement establishes reliable electrical connection while minimizing the required area and volume compared to conventional separate-mounted interfaces.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The connector and feedthrough are designed as integrated components where the connector insulator incorporates the mounting structure for the feedthrough pin. This merging of functions reduces the overall area and volume required while maintaining electrical connection reliability.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS20230238736A1High voltage feedthrough and connector for a charged particle apparatus
Publication Date: 2023.07.27 ASML NETHERLANDS BV
  • US20230238736A1 patent drawing
  • US20230238736A1 patent drawing
  • US20230238736A1 patent drawing

AI summary

Disclosed herein is a connector for electrically connecting a feedthrough of a vacuum tool to a high voltage power source, the connector comprising: a connector wire assembly configured to be in electrical connection with a high voltage power source; and a connector insulator comprising a channel configured to extend into the connector insulator and to receive a feedthrough pin so as to electrically connect the connector wire assembly with the feedthrough pin; wherein the connector insulator is configured to engage with the feedthrough so that a boundary surface of the connector insulator extends substantially bi-directionally in the direction of the longitudinal axis of the channel.