Ferroelectric Memory Cell Assembly With Leaker Electrodes for Leakage Control

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Solution Overview

Problem

Memory devices face challenges in reducing leakage through dielectric materials, which affect data reliability and power consumption, especially as circuitry is scaled to smaller dimensions.

Innovation Solution

The implementation of L-shaped bottom electrodes with leaker-device-structures extending laterally between neighboring electrodes, coupled with a ferroelectric material, forms memory cells that control undesired leakage and improve data storage efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If circuitry is scaled to smaller dimensions to achieve higher density, then storage capacity increases, but leakage through dielectric material worsens

Engineering Contradiction:
Improvestorage capacityVSAvoidleakage
Core Design Contradiction:
Quantity of substanceVSObject-generated harmful factors

Solution Approach 1:

A leaker device is introduced as an intermediary component between the bit line and ground. This device selectively conducts leakage current away from the dielectric material, acting as a mediator that captures and redirects the harmful leakage path without affecting the normal storage operation of the memory cell

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The leakage current path is extracted and separated from the main memory cell operation. The leaker device provides a dedicated extraction path for leakage current, removing it from the harmful path through the dielectric material and directing it safely to ground

Inventive Principle:
Principle #2Taking out (Extraction)

2Ease of manufacture

If traditional memory cell architectures are used, then fabrication is simpler, but leakage control becomes difficult at small dimensions

Engineering Contradiction:
Improvefabrication simplicityVSAvoidleakage control
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The leaker device is merged with the existing memory cell structure, sharing common components such as the bottom electrode and dielectric material. This integration allows leakage control functionality to be combined with the storage cell without requiring completely separate fabrication processes

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The bottom electrode serves multiple functions: it acts as an electrode for the storage capacitor and simultaneously serves as the control electrode for the leaker device. This multi-functionality reduces the number of additional components needed while achieving leakage control

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively reduces leakage, enhances data storage reliability, and maintains high-speed access while using less power, addressing the challenges of miniaturization in memory devices.

Implementation Method 1

Ferroelectric-insulative-material is between the top-electrode-material and the bottom electrodes

Methodology Applied
Scientific EffectFerroelectric polarization:

Data Source

PatentUS12453099B2Integrated assemblies and methods of forming integrated assemblies
Publication Date: 2025.10.21 MICRON TECHNOLOGY INC
  • US12453099B2 patent drawing
  • US12453099B2 patent drawing
  • US12453099B2 patent drawing

AI summary

Some embodiments include an integrated assembly having first and second pillars of semiconductor material. The first pillar includes a first source/drain region, and the second pillar includes a second source/drain region. First and second bottom electrodes are coupled with the first and second source/drain regions, respectively. The first and second source/drain regions are spaced from one another by an intervening region. First and second leaker-device-structures extend into the intervening region from the first and second bottom electrodes, respectively. Top-electrode-material extends into the intervening region and contacts the first and second leaker-device-structures. Ferroelectric-insulative-material is between the top-electrode-material and the bottom electrodes. Some embodiments include methods of forming integrated assemblies.