Ferromagnetic Anode Gas Analyzer for Ultrahigh Vacuum Detection
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Solution Overview
Problem
Conventional gas analyzers face challenges in achieving a wide operable range from ultrahigh vacuum to medium vacuum and a low lower limit of detection for partial pressure, particularly struggling to detect ultralow concentrations below 10−7 Pa due to limitations in discharge maintenance and optical emission detection efficiency.
Innovation Solution
A gas analyzer design that incorporates a tightly closable vacuum casing with a ferromagnetic anodic electrode and a magnetic field applying module to concentrate and enhance magnetic fields, allowing for localized discharge optical emission and improved detection accuracy, along with the introduction of a tiny amount of gas with metastable excitation energy to enhance optical emission intensity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If magnetic field discharge is used to maintain discharge in high vacuum range, then operable range is extended to high vacuum, but lower limit of partial pressure detection remains at about 10−3 Pa due to weak optical emission
Solution Approach 1:
The patent applies local quality by concentrating the magnetic field in a specific region using a ferromagnetic anodic electrode. This localized magnetic field concentration causes electrons to be confined to a small area, intensifying the discharge optical emission in that local region. As a result, the lower limit of partial pressure detection is improved to 10−7 Pa while maintaining the ability to operate across a wide vacuum range from medium vacuum to ultrahigh vacuum.
2Reliability
If Penning discharge method is used to excite gas, then discharge can be maintained in vacuum below 10−4 Pa, but optical emission is weak making lower limit of partial pressure detection about 10−3 Pa
Solution Approach 1:
The patent uses a ferromagnetic anodic electrode to locally concentrate the magnetic field, which confines electrons to a small region and intensifies the optical emission. This resolves the contradiction by maintaining reliable discharge in vacuum below 10−4 Pa while simultaneously achieving strong optical emission with a lower limit of partial pressure detection at 10−7 Pa.
Solution Approach 2:
The patent changes the magnetic field distribution parameter by introducing a ferromagnetic material in the anodic electrode. This modifies the magnetic field from a uniform distribution to a concentrated distribution, which directly intensifies the optical emission and improves detection sensitivity without compromising discharge reliability.
3Adaptability or versatility
If conventional gas analyzer is used, then wide operable range from ultrahigh vacuum to medium vacuum is achieved, but lower limit of detection of partial pressure cannot reach ultralow concentration of 10−7 Pa
Solution Approach 1:
The patent applies local quality through the ferromagnetic anodic electrode that concentrates the magnetic field in a specific region. This localization intensifies the discharge optical emission, enabling the detector to measure partial pressures down to 10−7 Pa. The device maintains its ability to operate across the full range from medium vacuum to ultrahigh vacuum while achieving ultralow detection sensitivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables a lower limit of detection at 10−7 Pa with increased detection accuracy and intensity of optical emission, effectively addressing the limitations of existing gas analyzers by localizing discharge optical emission and enhancing detection efficiency.
Implementation Method 1
magnetic field applying module generating magnetic field in a direction crossing electric field generated when a high voltage is applied between the anodic electrode and the cathode electrode
Implementation Method 2
Electrons emitted from the vacuum casing 1 of a cathode are accelerated with the electric field E as well as subjected to a Lorentz force with an electric field E and a magnetic field M, thus making a spiral movement
Implementation Method 3
at least one of the anodic electrode and cathode electrode, and the magnetic field applying module is/are composed so as to concentrate and/or enhance magnetic field generated in an area of discharge optical emission
Implementation Method 4
Electric field E is created between the electrode 2 as an anode and the vacuum casing 1 as a cathode when direct current voltage of several kV is applied to the electrode 2
Implementation Method 5
a partial pressure measurement mechanism by measuring intensity of optical emission of various gases
Implementation Method 6
light detecting module for detecting discharge optical emission generated in magnetic field
Data Source
AI summary
An elongated ferromagnetic anodic electrode is fixed to a tightly closable pipe shape vacuum casing so as to extend within the casing as a cantilever and magnetic field applying module is disposed so as to concentrate magnetic field at a tip side position of the ferromagnetic anodic electrode in an area of discharge optical emission when a high voltage is applied between the anodic electrode and the vacuum casing as a cathode electrode. In addition, a vacuum casing can be formed with a ferromagnetic and soft magnetic material for magnetic flux to be permeable well, or a tip side alone of an anodic electrode rather than the anodic electrode itself can be formed with a ferromagnetic material, or a ferromagnetic member can be disposed at a near position of an anodic electrode, so as to concentrate magnetic field in a vicinity of a tip of an anodic electrode.