Integrated FESEM-LDI-TOF-MS Analysis for Vacuum Sample Transfer
Solution Overview
Problem
Conventional FESEM and LDI-TOF-MS analysis systems require sample transfer between systems, leading to damage and difficulty in maintaining a non-exposed atmosphere state, and mismatched analysis areas.
Innovation Solution
An integrated analysis system with first and second sample holders and a glove box unit maintains a non-exposed atmosphere state and prevents sample damage by allowing transfer within a vacuum environment, using positioning markers for accurate analysis on the same area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If sample transfer between FESEM and LDI-TOF-MS systems is performed, then analysis capability is improved, but sample damage occurs and atmospheric exposure cannot be maintained
Solution Approach 1:
The patent combines FESEM and LDI-TOF-MS systems into a single integrated platform where both analytical instruments share a common vacuum chamber and sample holder. This merging eliminates the need to transfer samples between separate systems, thereby preventing sample damage and maintaining atmospheric exposure control while preserving both analytical capabilities.
Solution Approach 2:
The integrated system employs a universal sample holder and vacuum chamber that serve both FESEM and LDI-TOF-MS analytical functions. The sample holder is designed to accommodate samples for both electron microscopy and laser desorption/ionization analysis without requiring sample removal or repositioning, enabling multi-functional analysis on the same sample within the same atmospheric environment.
2Adaptability or versatility
If sample transfer between systems is performed, then analysis capability is improved, but maintaining non-exposed atmosphere state becomes difficult
Solution Approach 1:
By merging FESEM and LDI-TOF-MS into a single vacuum-based integrated system, the patent eliminates repeated vacuum breaking and atmospheric exposure during sample transfer. The sample remains in a controlled non-exposed atmosphere throughout both analytical processes, significantly improving atmosphere maintenance efficiency while enabling comprehensive analysis.
3Adaptability or versatility
If separate measurement means are used for FESEM and LDI-TOF-MS, then analysis capability is improved, but analysis area matching becomes difficult
Solution Approach 1:
The integrated system merges FESEM and LDI-TOF-MS measurement means within a single vacuum chamber with a common sample holder. This spatial merging enables precise coordination of electron beam and laser irradiation positions, allowing accurate matching of analysis areas through coordinated control of both measurement systems on the same sample location.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables FESEM and LDI-TOF-MS analysis on a single sample without atmospheric exposure, preserving the sample and ensuring consistent analysis areas.
Implementation Method 1
the field-emission scanning electron microscope (FESEM) is an apparatus that injects accelerated electron beams from a field emission (FE) electron gun
Implementation Method 2
injects accelerated electron beams from a field emission (FE) electron gun
Implementation Method 3
detects signals such as secondary electrons, reflected electrons, and X-rays generated on the surfaces of the sample
Implementation Method 4
detects signals such as secondary electrons, reflected electrons, and X-rays generated on the surfaces of the sample
Implementation Method 5
Laser desorption/ionization-time of flight-mass spectrometry (LDI-TOF-MS) irradiates the sample with a laser, ionizes the sample
Implementation Method 6
ionizes the sample
Implementation Method 7
the ionized sample materials are separated by flight time according to the mass, and the time reaching a detector varies
Implementation Method 8
a glove box unit in which a sample for analysis transfer space is formed
Data Source
Figure 1a~1c
Figure 2~3
Figure 4~5a
AI summary
The present invention relates to an integrated FESEM and LDI-TOF-MS analysis system, and provides an integrated FESEM and LDI-TOF-MS analysis system that can perform FESEM analysis and LDI-TOF-MS analysis on a single sample to be analyzed without exposing the sample to the atmosphere.