Focused Ion Beam Chamber Airbag for Faster Pump-Down and Cleaner Samples

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Solution Overview

Problem

Focused ion beam apparatuses face challenges in reducing the time required for evacuating the chamber and preventing molecule deposition on samples, which can contaminate the wafer surface and interfere with analysis.

Innovation Solution

Incorporating an airbag in the focused ion beam chamber that inflates to reduce the chamber's volume, allowing for faster evacuation and using a conductive polymer coating on the airbag to adsorb and remove contaminants, thereby preventing molecule deposition on the sample.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the focused ion beam chamber is evacuated using a pump, then the chamber can be prepared for sample analysis, but the evacuation process takes a considerable amount of time

Engineering Contradiction:

Improvesample analysis readinessVSAvoidevacuation time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The airbag is inflated before the evacuation process begins, pre-reducing the chamber volume to minimize the time required for pumping down to the necessary vacuum level for sample analysis

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The airbag volume is dynamically adjusted during the evacuation process, being inflated to reduce volume and then deflated after evacuation is complete, allowing the system to adapt to different operational phases

Inventive Principle:

Principle #15Dynamics

2Adaptability or versatility

If various gases are injected into the focused ion beam chamber for deposition processing, then processing operations can be performed, but molecules remain in the chamber and contaminate the sample surface

Engineering Contradiction:

Improveprocessing capabilityVSAvoidsample contamination

Core Design Contradiction:

Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The airbag is removed from the chamber after use, and the chamber is evacuated to remove contaminant molecules, separating the processing function from the sample environment

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The airbag acts as an intermediary element that can be introduced into the chamber for volume reduction during evacuation, without directly contacting or contaminating the sample

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces the evacuation time of the focused ion beam chamber and minimizes contamination, ensuring reliable sample analysis by effectively managing the chamber's volume and adsorbing contaminants.

Implementation Method 1

filling an airbag with air, the airbag being installed in a position in the focused ion beam chamber that does not interfere with the sample stage

Methodology Applied

Scientific EffectGas pressure inflation: Pressure Increase

Implementation Method 2

using a conductive polymer coating on the airbag to adsorb and remove contaminants

Methodology Applied

Scientific EffectAdsorption: Adsorption

Data Source

PatentUS20240282548A1Focused ion beam apparatus and control method thereof

Publication Date: 2024.08.22 SAMSUNG ELECTRONICS CO LTD

AI summary

A focused ion beam apparatus may include an ion beam emitter for emitting an ion beam, a focused ion beam chamber into which ion gas may be introduced, a sample stage in the focused ion beam chamber to support a wafer sample, and an air bag in the focused ion beam chamber. The airbag may be positioned to not interfere with the sample stage.