Focused Ion Beam Defect Repair on Liquid Crystal Display Panels
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Solution Overview
Problem
Current liquid crystal display manufacturing processes result in waste of entire glass panels due to the necessity of cutting them into small pieces for FIB analysis, leading to material and cost wastage.
Innovation Solution
A detecting method and equipment that includes an inspection apparatus, a first ion overhaul apparatus for cutting defective positions using a focused ion beam, and a repair apparatus, all sequentially installed on the same production line, allowing for the identification and repair of defects on the glass panel without cutting it into pieces, utilizing optical or ion beam inspection and scanning electron microscopy for real-time monitoring.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the glass panel is cut into small pieces for FIB analysis, then the defect can be analyzed, but the whole glass panel is wasted
Solution Approach 1:
The patent applies segmentation by dividing the glass panel into a work area and a non-work area, where only the defective region is processed for FIB analysis and repair. This allows precise localization of defects without wasting the entire panel, enabling selective analysis and repair of only the necessary portions while preserving the rest of the panel for continued use
Solution Approach 2:
The patent implements local quality by applying different processing treatments to different regions of the glass panel. The defective area receives FIB analysis and repair treatment, while the non-defective areas remain unchanged. This localized approach ensures that only the necessary portions are modified, maintaining the integrity and usability of the entire panel
2Measurement precision
If the glass panel is cut into small pieces for FIB analysis, then the defect morphology can be observed, but the production cost increases
Solution Approach 1:
The patent segments the panel processing into inspection, analysis, and repair stages, where only panels with detected defects undergo FIB analysis. This selective processing based on preliminary inspection avoids unnecessary analysis of defect-free panels, reducing overall production costs while maintaining high measurement precision for actual defects
Solution Approach 2:
The patent performs preliminary optical inspection before FIB analysis to identify defective positions. This preliminary action filters out defect-free panels, ensuring that expensive FIB analysis resources are only applied to panels that actually require it, thereby reducing production costs while maintaining high defect detection capability
3Productivity
If multiple apparatuses are installed on the same production line, then the processing efficiency is improved, but the device complexity increases
Solution Approach 1:
The patent merges multiple functions (inspection, FIB analysis, and repair) into a single integrated production line with sequential apparatuses. This allows continuous processing where panels move through inspection → analysis → repair in one flow, improving productivity by eliminating the need to remove and reposition panels between different workstations, while the modular sequential design manages complexity through functional integration
4Reliability
If the defective position is cut and repaired, then the product quality is maintained, but the processing time increases
Solution Approach 1:
The patent performs preliminary optical inspection to identify defective positions before FIB analysis. This preliminary detection allows for targeted processing, reducing the time required for comprehensive panel analysis while ensuring that all defects are caught early in the process, maintaining product quality without excessive processing time
Solution Approach 2:
The patent enables skipping of the FIB analysis and repair steps for panels that pass the preliminary optical inspection. Only panels with detected defects undergo the time-consuming FIB process, allowing the majority of defect-free panels to move through production quickly, thereby reducing overall processing time while maintaining high product quality standards
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables the retention and repair of whole glass panels, reducing waste and production costs while ensuring staff safety and maintaining product quality.
Implementation Method 1
using a first focused ion beam generated by a first ion overhaul apparatus to cut the defective position of the display panel, so as to strip a defect at the defective position and observe morphology of defect
Implementation Method 2
the optical inspection machine uses an optical camera to scan the whole display panel for image capturing and compares data of a captured image with qualified parameters stored in a database
Implementation Method 3
a scanning electron microscope simultaneously is used to observe the defective position being stripped, to judge whether a result of the stripping meets a subsequent repair requirement in real-time
Data Source
AI summary
A detecting method and a detecting equipment therefor are provided. The detecting method includes: inspecting whether a display panel has a defective position; after acquiring the defective position of the display panel by the inspecting, using a first focused ion beam generated by a first ion overhaul apparatus to cut the defective position of the display panel, so as to strip a defect at the defective position and observe morphology of defect; using a repair apparatus to perform a repair treatment on the defective position after the defect is stripped. An inspection apparatus for the inspecting of the defective position, the first ion overhaul apparatus and the repair apparatus are sequentially installed on the same production line.