Spectroscopic Analysis of Focused Ion Beam Induced Optical Emission
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Solution Overview
Problem
Focused ion beam induced optical emission (FIB-IOE) signals are challenging to analyze due to overlapping contributions from elemental, molecular, and bandgap emissions, making it difficult to identify the elemental composition of samples.
Innovation Solution
A method for spectroscopic analysis that identifies spectral peaks and determines their emission types based on the spectral resolution of the light collection system, allowing for the differentiation between elemental, molecular, and bandgap emissions, and subsequent identification of elemental composition using databases.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If FIB-IOE signals are collected from the sample, then additional compositional information is obtained, but the analysis becomes challenging due to overlapping emissions from multiple sources
Solution Approach 1:
The patent segments the complex FIB-IOE signal into distinct emission components (elemental, molecular, and bandgap emissions) by analyzing spectral peaks at different removal rates. This segmentation allows each emission type to be identified and analyzed separately, resolving the overlapping signal problem while preserving all compositional information.
Solution Approach 2:
The patent performs preliminary spectral analysis at multiple removal rates before final composition determination. By collecting and analyzing spectra at different ion beam removal rates, the method prepares and organizes the overlapping emission data in advance, making subsequent compositional analysis more straightforward and accurate.
2Measurement precision
If spectral analysis is performed to identify emission types, then elemental composition can be determined, but the process requires differentiating between multiple overlapping emission sources
Solution Approach 1:
The patent changes the ion beam removal rate parameter to differentiate between emission types. By analyzing how spectral peaks behave at different removal rates, the method identifies which peaks correspond to elemental emissions (which persist), molecular emissions (which diminish), and bandgap emissions (which change characteristics), thereby simplifying the differentiation process while maintaining high measurement precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate determination of elemental and molecular compositions by analyzing peak widths and comparing spectra with databases, effectively disentangling overlapping emission types in FIB-IOE signals.
Implementation Method 1
Focused ion beam induced optical emission (FIB-IOE) may provide additional information on sample composition
Implementation Method 2
accessing a spectrum of photons emitted from a sample responsive to irradiating the sample with an ion beam
Data Source
AI summary
Methods and systems for spectroscopic analysis of focused ion beam induced optical emission include accessing a spectrum acquired from a sample responsive to irradiating the sample with an ion beam and identifying the spectral peaks of the spectrum. The emission type of the spectral peak is determined based on a spectral resolution of a light collection system for collecting the spectrum. The emission types include elemental emission, molecular emission, and bandgap emission.