FIB Milling with Real-Time Elemental Detection
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Solution Overview
Problem
FIB milling devices require skilled operators to adjust conditions based on sample composition and shape changes during processing, leading to inefficient processing of samples with unknown materials and structures, as the operator must manually change settings according to analysis results and surface material changes.
Innovation Solution
A charged particle beam device with an ion beam optical system, element detector, and central processor that automatically sets conditions for FIB milling based on detected elemental composition, enabling processing of samples with unknown materials and structures into desired shapes without operator skill dependency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If manual operation by skilled worker is used to adjust FIB milling conditions, then processing quality can be maintained through expert knowledge, but processing efficiency decreases due to repeated manual adjustments and analysis
Solution Approach 1:
The system performs self-analysis by automatically detecting elemental composition during FIB milling and self-adjusts processing conditions based on the detected information, eliminating the need for continuous manual intervention while maintaining high processing quality
Solution Approach 2:
The system implements a feedback loop where the FIB milling process generates secondary ions that are detected and analyzed in real-time, and the analysis results are fed back to automatically adjust milling conditions, creating a closed-loop control system that improves both quality and efficiency
2Object-affected harmful factors
If low energy FIB beam is used to process samples with uncertain materials, then sample damage is reduced, but processing speed decreases significantly
Solution Approach 1:
The system dynamically adjusts beam energy levels based on real-time elemental analysis results, allowing the use of low energy beams when processing unknown materials initially, then automatically increasing energy when material composition is identified, thus optimizing both sample protection and processing speed throughout the milling process
3Ease of operation
If automatic condition setting is implemented based on elemental detection, then operator skill dependency is eliminated, but device complexity increases due to additional detection and control systems
Solution Approach 1:
The system uses the same ion beam for both FIB milling and generating secondary ions for elemental analysis, making the detection system multi-functional by utilizing byproducts of the main processing operation, thereby reducing the need for separate dedicated detection equipment and minimizing additional device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables automatic and efficient FIB milling of samples with unknown compositions into precise shapes, reducing processing time and improving consistency by automatically adjusting conditions based on real-time elemental analysis, regardless of material differences.
Implementation Method 1
The FIB milling device irradiates a sample with an ion beam focused to sub-micron order while scanning the ion beam by electrostatic deflection, thus processing the sample at a target position into a desired shape
Implementation Method 2
a secondary ion detector to detect secondary ions generated from the sample
Data Source
AI summary
Provided is a technique to perform FIB milling, in spite of its sample dependency, effectively into a desired shape without influences of individual differences among operators. A charged particle beam device includes an ion beam optical system device configured to irradiate a sample with an ion beam generated at an ion source; a controller thereof; an element detector configured to detect elements constituting the sample; a controller thereof; and a central processor configured to automatically set conditions for the sample based on the element specified by the element detector.