FIB Needle Repair via CVD and Sputter Etching

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Solution Overview

Problem

Conventional methods for correcting defects in the tip needle portion of a manipulator within a focused ion beam (FIB) device require time-consuming and costly procedures, involving the removal and replacement of the needle, which can result in sample loss and increased operator workload, as the needles are susceptible to shock and have insufficient strength.

Innovation Solution

The method involves using the FIB device to repair the needle portion by cutting and reshaping the tip with sputter etching and re-forming it using Chemical Vapor Deposition (CVD), allowing for in-situ repair within the vacuum chamber without removing the manipulator, utilizing a microscope for defect observation and employing auxiliary needles planted on a substrate for replacement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the needle is sharpened to about several μmφ to enable fine sample handling, then the manipulator can grasp fine section samples, but the needle becomes susceptible to external shock and bends at the tip portion

Engineering Contradiction:

Improvefine sample handling capabilityVSAvoidneedle tip strength

Core Design Contradiction:

Measurement precisionVSStrength

Solution Approach 1:

The patent applies preliminary action by preparing multiple replacement needles in advance and positioning them near the manipulator tip. When the original needle bends or breaks, a replacement needle is already ready to be quickly installed, eliminating the need to leave the vacuum chamber for needle replacement and preventing sample loss.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent changes the physical state and material properties of the needle by coating the needle surface with a protective layer (such as diamond-like carbon or other hard coatings). This coating increases the needle's hardness and resistance to bending while maintaining the sharp tip geometry needed for fine sample handling.

Inventive Principle:

Principle #35Parameter changes

2Reliability

If the needle is replaced when bent or broken, then the manipulator functionality is restored, but the vacuum chamber must be opened and work must restart from vacuum creation

Engineering Contradiction:

Improvemanipulator functionalityVSAvoiddowntime for needle replacement

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

Multiple replacement needles are prepared in advance and stored in the vacuum chamber near the manipulator. This preliminary preparation allows immediate replacement of a bent or broken needle without opening the vacuum chamber, thus avoiding time loss and maintaining continuous operation.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent creates a universal needle replacement system where multiple identical needles are prepared in advance. Any needle can replace any other, and the replacement mechanism is designed to accommodate quick swapping without complex procedures, making the system universally applicable to various needle failure scenarios.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Ease of repair

If conventional needle replacement is performed by opening the vacuum chamber, then the defective needle can be removed and replaced, but sample loss occurs and operator workload increases

Engineering Contradiction:

Improveneedle replacement capabilityVSAvoidsample loss

Core Design Contradiction:

Ease of repairVSLoss of substance

Solution Approach 1:

Replacement needles are prepared and positioned in advance within the vacuum chamber. This preliminary action enables the operator to quickly replace a defective needle without opening the chamber, thus preventing sample loss and reducing the operational complexity of the replacement process.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system is designed to be self-sufficient by keeping replacement needles and replacement tools within the vacuum chamber. The manipulator can service itself by swapping needles without external intervention or chamber opening, making the repair process simple and rapid.

Inventive Principle:

Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables immediate repair of defective needle portions, reducing downtime and sample loss, while maintaining the manipulator's functionality within the vacuum chamber, and is applicable to both micro-manipulators and micro-tweezers, enhancing the efficiency and universality of needle replacement.

Implementation Method 1

cutting and reshaping the tip with sputter etching

Methodology Applied

Scientific EffectSputter etching: Sputtering

Implementation Method 2

re-forming it using Chemical Vapor Deposition (CVD)

Methodology Applied

Scientific EffectChemical Vapor Deposition: Chemical Vapour Deposition

Data Source

PatentUS7356900B2Manipulator needle portion repairing method

Publication Date: 2008.04.15 HITACHI HIGH TECH SCIENCE CORP

AI summary

In a manipulator needle portion defect repairing method, the existence of an abrasion or a fracture in a needle portion for holding a sample at an end of a manipulator disposed in an FIB device is confirmed using a microscope function of the FIB device. The abrasion or the fracture in the needle portion is then repaired by chemical vapor deposition using a focused ion beam of the FIB device.