Focused Ion Beam Sample Stage Assembly for Chamber Space Constraints
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Solution Overview
Problem
Existing focused ion beam systems face challenges in effectively utilizing their sample chambers due to the presence of multiple devices near the ion beam optical axis, limiting the space for sample manipulation and milling.
Innovation Solution
The system incorporates a sample stage assembly with a first drive mechanism for moving the sample holder and a second drive mechanism for moving the sample holder and first drive mechanism as a unit, allowing for precise placement of the sample at the intersection of the ion beam and electron beam optical axes, enhancing the use of the sample chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple devices (FIB column, SEM column, probe) are disposed near the optical axis of the ion beam optical system in the sample chamber, then the system can perform multiple functions (ion beam milling, electron beam observation, sample extraction), but the available space for sample manipulation and milling is limited
Solution Approach 1:
The sample holder is designed with a nested structure where the sample stage assembly can be inserted into and removed from the sample chamber. The drive mechanisms are positioned outside the sample chamber, with only the sample holder penetrating into the chamber, maximizing the utilization of limited space while maintaining multiple functional capabilities.
Solution Approach 2:
The sample holder and sample stage assembly are designed to be movable rather than fixed. The second drive mechanism moves the entire sample holder assembly along the optical axis, allowing dynamic adjustment of sample position and enabling different operational configurations within the constrained space of the sample chamber.
2Manufacturing precision
If the sample holder is placed near the optical axis for ion beam milling, then the sample can be effectively milled, but the space for other devices and sample manipulation is reduced
Solution Approach 1:
The sample holder is designed with movable components that can be positioned dynamically. The first drive mechanism moves the sample holder radially, while the second drive mechanism moves it axially, allowing the sample to be precisely positioned at the optimal location for ion beam milling when needed, while maintaining flexibility for other operations.
Solution Approach 2:
The drive system is segmented into two independent mechanisms: the first drive mechanism for radial movement and the second drive mechanism for axial movement. This segmentation allows independent control of sample position in different directions, enabling precise positioning for milling while maintaining space for other devices.
3Device complexity
If a single drive mechanism is used for sample holder movement, then the device complexity is reduced, but the ability to perform both bulk and microscopic sample handling is limited
Solution Approach 1:
The drive system is divided into two independent drive mechanisms with distinct functions. The first drive mechanism handles radial positioning for precise sample alignment, while the second drive mechanism handles axial positioning for loading and unloading samples. This segmentation enables both bulk and microscopic sample handling capabilities while keeping each individual drive mechanism relatively simple.
Solution Approach 2:
The sample holder assembly is designed to be universal, capable of holding both bulk samples and microscopic samples. The two-drive mechanism system provides the versatility needed to handle different sample types and perform different operations (milling, observation, extraction) using a single integrated device.
Data Source
AI summary
There is provided a focused ion beam system having a sample chamber which can be effectively used. The focused ion beam system includes an electron optical column having an optical system for directing an ion beam at a sample; a sample chamber in which the sample is placed and which can be maintained in a vacuum state; a sample holder having a shaft and a sample holding portion which is formed in a front end of the shaft and which is operative to hold the sample; and a sample stage assembly for detachably holding the sample holder. The sample stage assembly has a first drive mechanism for moving the sample holder and a second drive mechanism for moving the sample holder and the first drive mechanism as a unit along an axis of the shaft.