FIB-SEM Composite Beam Alignment for Orthogonal Observation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In FIB-SEM composite apparatuses with orthogonally arranged columns, it is difficult for operators to grasp the positional relationship of the sample between FIB and SEM images due to mismatched horizontal directions, hindering high-resolution SEM observation of sample surfaces processed by FIB.
Innovation Solution
A composite charged particle beam apparatus with orthogonally arranged FIB and SEM columns, including a scanning control portion to align beam scanning directions and an image processing portion to align image horizontal directions, enabling display of FIB and SEM images with the same horizontal sample orientation, and a three-dimensional image formation portion to reverse SEM images for accurate structure reproduction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the FIB column and SEM column are orthogonally arranged, then high-resolution SEM observation of cross-sections is enabled, but the sample surface observed by FIB cannot be observed by SEM and the positional relationship is difficult to grasp
Solution Approach 1:
The patent introduces a new dimension of image processing by adding a horizontal direction to the traditional perpendicular direction alignment. This allows the system to maintain orthogonal column arrangement for high-resolution cross-section observation while simultaneously enabling surface observation and intuitive positional relationship comprehension through multi-directional image alignment.
Solution Approach 2:
The patent introduces an image processing unit as an intermediary component that processes and aligns images from both FIB and SEM in multiple directions. This intermediary enables the orthogonal arrangement to produce intuitive composite images by mediating between the physical orthogonal configuration and the desired intuitive visual representation.
2Ease of operation
If the FIB column and SEM column are arranged at an angle of 50° to 60°, then the same region can be observed by both FIB and SEM with intuitive positional relationship, but high-resolution SEM observation of cross-sections from perpendicular direction is not enabled
Solution Approach 1:
The patent adds the horizontal direction dimension to image alignment, allowing the system to maintain the advantageous 50° to 60° angular arrangement for intuitive positional relationship comprehension while simultaneously enabling high-resolution cross-section observation through multi-directional image processing and alignment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates easy grasping of the positional relationship between FIB and SEM images, allowing for intuitive operation and high-resolution SEM observation of sample surfaces, and enables the construction of accurate three-dimensional images of the sample structure.
Implementation Method 1
a focused ion beam (FIB) apparatus is known as an apparatus for processing and observing a minute sample
Implementation Method 2
an apparatus for observing a sample under processing by a focused ion beam in real time through a scanning electron microscope (SEM)
Implementation Method 3
a detector for detecting a secondary particle generated from the sample
Data Source
AI summary
A composite charged particle beam apparatus comprises an FIB column having an ion beam irradiation axis and an SEM column having an electron beam irradiation axis, the FIB and SEM columns being arranged relative to one another so that the beam irradition axes intersect with each other substantially at a right angle. A sample stage is provided for mounting a sample, and a detector detects secondary particles generated from the sample when irradiated with the ion beam or the electron beam. An observation image formation portion forms an FIB image and an SEM image based on a detection signal of the detector. A display portion displays the FIB image and the SEM image in which a horizontal direction of the sample in the FIB image and said horizontal direction of the sample in the SEM image are the same thereby making it possible for an operator to easily comprehend the positional relationship of the observation image of the sample.