FIB-SEM System Control Through Process Segmentation
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Solution Overview
Problem
The throughput of FIB-SEM systems in the semiconductor industry is limited, necessitating improved operational efficiency for multiple systems used simultaneously in producing TEM samples.
Innovation Solution
The method involves configuring FIB-SEM systems to perform predefined processes in two groups, with the first group automated and the second requiring user assistance, and prioritizing processes to optimize operation, including sample exchange, gas reservoir exchange, and image verification, to enhance operational efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple FIB-SEM systems are operated simultaneously to increase throughput, then productivity increases, but the complexity of coordinating and managing multiple systems increases
Solution Approach 1:
The patent segments the operational processes of FIB-SEM systems into two distinct groups: automated processes (first group) and user-assisted processes (second group). This segmentation allows the control system to manage multiple systems more effectively by automatically handling routine tasks while selectively engaging user intervention only when necessary, thereby increasing throughput without proportionally increasing operational complexity
Solution Approach 2:
The patent implements preliminary action by pre-defining and categorizing processes into automated and user-assisted groups before operation begins. The control system is pre-configured with process lists that identify which tasks can be automated and which require user input, allowing multiple systems to be coordinated efficiently from the start without ad-hoc decision-making during operation
2Productivity
If automated processes are implemented to increase throughput, then productivity increases, but the extent of automation must be carefully managed to maintain flexibility for user-intensive tasks
Solution Approach 1:
The patent applies dynamics by creating a flexible, adaptive automation system where the extent of automation is not fixed but can dynamically adjust based on process requirements. The control system automatically manages processes in the first group while maintaining the capability to transition to user-assisted mode for processes in the second group, allowing the automation level to optimize throughput while preserving necessary human intervention flexibility
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach increases the throughput of FIB-SEM systems by automating routine tasks and prioritizing user-intensive processes, thereby improving the overall efficiency and productivity of multiple systems operating in parallel.
Implementation Method 1
each of the FIB-SEM systems includes an electron beam column for directing an electron beam onto a work region... detectors that are configured to detect signals that are triggered by the electron beam
Implementation Method 2
each of the FIB-SEM systems includes an ion beam column for directing an ion beam onto the work region... detectors that are configured to detect signals that are triggered by the ion beam
Implementation Method 3
it is possible to remove material from the object using the ion beam... performing ion beam etching without supply of a process gas, performing ion beam etching with supply of a process gas
Implementation Method 4
depositing material on the object without supply of a process gas under irradiation by the electron beam, depositing material on the object with supply of a process gas under irradiation by the electron beam
Data Source
AI summary
Processes may be performed with a plurality of FIB-SEM systems. A first process group includes recording an image with the electron beam column, depositing material with supply of a process gas, and performing ion beam etching. A second process group includes performing a sample exchange, exchanging a reservoir of a gas source for the process gas, and verifying an image that was recorded with the electron beam column. The processes of the second group are prioritized. The FIB-SEM systems are actuated to work through processes contained in process lists. If in a plurality of FIB-SEM systems processes of the second group are to be performed simultaneously, an instruction based on the prioritization is output to the user.