FIB-SEM Recipe Management for Consistent Sample Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Operators face significant burdens in adjusting and setting conditions for observation and processing in FIB-SEM composite apparatuses due to the lack of shared settings and apparatus differences, leading to variability in sample quality and yield ratios.
Innovation Solution
A computer-based system that includes an information obtainer, manager, selector, and assigner to standardize and share recipe management information across multiple FIB-SEM composite apparatuses, reducing operator intervention and coordinating settings across devices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If operators manually adjust and set conditions for each FIB-SEM apparatus, then apparatus-specific optimization is achieved, but operator workload increases and consistency across apparatuses decreases
Solution Approach 1:
The system creates a master recipe that stores optimized observation and processing conditions. This master recipe is then copied and distributed to multiple FIB-SEM apparatuses, eliminating the need for operators to manually adjust settings at each device while maintaining consistent sample quality across all apparatuses.
Solution Approach 2:
The patent introduces a recipe management system as an intermediary between operators and FIB-SEM apparatuses. This intermediary handles the complex task of condition adjustment and coordination, allowing operators to simply select from pre-configured recipes rather than manually tuning each parameter at every apparatus.
2Adaptability or versatility
If separate adjustment and setting is performed at each FIB-SEM apparatus, then apparatus-specific optimization is possible, but coordination between multiple apparatuses becomes difficult
Solution Approach 1:
The recipe management system serves multiple functions: it stores optimized conditions for different apparatuses, coordinates processing across multiple devices, and adapts to specific apparatus characteristics through apparatus-specific recipe variations. This universal system handles both general coordination and specific optimization needs in a unified manner.
3Productivity
If manual adjustment and setting is performed without standardized recipes, then flexibility in handling different samples is maintained, but work time increases and proficiency-dependent variability occurs
Solution Approach 1:
The system performs preliminary action by pre-configuring optimized observation and processing conditions in master recipes before actual sample processing begins. These pre-configured recipes eliminate the need for time-consuming manual adjustments during sample manufacturing, significantly improving productivity while reducing the time loss associated with repeated setup procedures.
4Manufacturing precision
If operators perform adjustment and setting work, then sample quality can be optimized, but quality variability depending on operator proficiency occurs
Solution Approach 1:
The recipe management system enables self-service by providing pre-configured, optimized recipes that automatically guide the processing parameters. This eliminates the need for operators to manually optimize settings, ensuring that sample quality consistency is maintained regardless of operator proficiency levels, as the system itself performs the optimization function.
Data Source
AI summary
The present invention provides a computer, a program, and a charged particle beam processing system, with which it is possible to reduce adjustment and setting work of conditions for observation or machining by an operator in an FIB-SEM composite device. This computer comprises: an information acquisition unit that acquires information related to a recipe to be executed by a charged particle beam device provided with a charged particle irradiation optical system; and an information management unit that generates recipe management information based on the information acquired by the information acquisition unit and stores the recipe management information in a storage unit.