Optical Fiber Actuator Homogenization Lithography
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In projection exposure apparatuses for semiconductor lithography, the intensity profile distribution of electromagnetic radiation at the exit end of optical fibres is often inhomogeneous, leading to undesired heating of optical elements due to incorrect spatial distribution, which affects the homogeneity and symmetry of radiation.
Innovation Solution
The use of an actuator to mechanically manipulate sections of the optical fibre, either by lateral movement or reversible alteration of the fibre cross section, achieves temporally averaged homogenization of the intensity profile, ensuring rotational symmetry and correct heating of optical elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If an optical fibre is used to transport electromagnetic radiation, then the radiation can be guided from outside the projection exposure apparatus, but the intensity profile distribution at the exit end becomes inhomogeneous
Solution Approach 1:
The patent applies the dynamics principle by making the optical fibre movable relative to the optical element through an actuator. The fibre can be laterally displaced or rotated to dynamically change the spatial distribution of the intensity profile, transforming the static inhomogeneous distribution into a dynamically adjustable configuration that achieves homogeneous heating of the optical element.
2Manufacturing precision
If the optical fibre is laterally displaced or rotated, then the intensity profile becomes more homogeneous, but the device complexity increases
Solution Approach 1:
The patent applies the intermediary principle by introducing an actuator as a mediating device between the optical fibre and the optical element. This actuator enables the controlled lateral displacement or rotation of the fibre without requiring complex direct control mechanisms, thereby achieving homogeneous intensity distribution while managing the added device complexity through a dedicated control component.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach results in a spatially homogenized and defined heating of optical elements, improving the optical imaging performance and preventing temperature-induced deformations by ensuring a homogeneous intensity profile distribution at the exit end of the fibre.
Implementation Method 1
Said optical fibre serves for transporting the electromagnetic radiation to the optical element in the projection exposure apparatus
Implementation Method 2
the IR radiation impinges on the optical element, is partly absorbed there and heats said element as a consequence
Implementation Method 3
the electromagnetic radiation serves for heating an optical element in the apparatus
Implementation Method 4
For the mechanical manipulation of a section of the fibre, an actuator is provided, as a result of which a temporally averaged homogenization of an intensity profile of electromagnetic radiation emerging at an exit end of the fibre can be achieved
Data Source
AI summary
A device for guiding electromagnetic radiation into a projection exposure apparatus for semiconductor lithography includes an optical fiber and an actuator for the mechanical manipulation of a section of the fiber as a result of which a temporally averaged homogenization of an intensity profile of electromagnetic radiation emerging at an exit end of the fiber can be achieved. A projection exposure apparatus for semiconductor lithography is equipped with the abovementioned device.