Optical Fiber Array Substrate Aperture Positioning
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Solution Overview
Problem
In high-volume throughput charged particle multi-beamlet lithography systems, accurately positioning a large number of optical fibers while minimizing space is challenging due to the complexity of aligning these fibers with light sensitive elements for reliable data transfer.
Innovation Solution
A method involving a substrate with apertures for precise placement of optical fibers, where each fiber is inserted and bent to abut the aperture side wall, then bonded together using an adhesive to form a compact and accurate fiber array, ensuring alignment with light sensitive elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a large number of optical fibers are used for data transfer in multi-beamlet lithography systems, then data transfer reliability is improved, but positioning accuracy and space occupation become problematic
Solution Approach 1:
The fiber array is divided into multiple groups, with each group corresponding to a specific beamlet. This segmentation allows for organized positioning and reduces the complexity of managing thousands of individual fibers, thereby improving positioning accuracy while maintaining data transfer reliability
Solution Approach 2:
A substrate with precisely positioned apertures is introduced as an intermediary structure. The apertures guide and position the optical fibers at accurate locations corresponding to light sensitive elements, solving the positioning accuracy problem without compromising data transfer reliability
2Measurement precision
If optical fibers are positioned very accurately for accurate data transfer, then data transfer precision is improved, but the volume occupied by the fiber array increases
Solution Approach 1:
Optical fibers are inserted through apertures in a substrate, with fiber ends positioned in close proximity to the second surface of the substrate. This nested arrangement allows accurate positioning within a compact volume, reducing the overall space occupied by the fiber array while maintaining alignment precision
Solution Approach 2:
The fiber array is arranged in a three-dimensional configuration with fibers extending through the substrate thickness. By utilizing the third dimension (depth), the system achieves precise alignment without requiring excessive lateral space, thus reducing the overall volume occupied
3Productivity
If the number of optical fibers is increased to handle high-volume throughput, then productivity is improved, but the complexity of fiber positioning and alignment increases
Solution Approach 1:
The substrate serves multiple functions: it provides mechanical support for the fiber array, defines precise positioning through its aperture pattern, and organizes fibers into groups corresponding to beamlets. This multi-functionality reduces positioning complexity while supporting high-volume throughput with a large number of fibers
Data Source
AI summary
A method for forming an optical fiber array. A substrate having a first surface and an opposing second surface is provided. The substrate is provided with a plurality of apertures extending through the substrate from the first surface to the second surface. In addition, a plurality of fibers are provided. The fibers have fiber ends with a diameter smaller than the smallest diameter of the apertures. A first fiber is inserted in a first corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface. The inserted first fiber is bent in a predetermined direction such that the fiber abuts a side wall of the first aperture at a predetermined position. After the first fiber is bent, a second fiber is inserted in a second corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface. The inserted second fiber is bent in conformity with a shape of the first fiber, such that the fiber abuts a side wall of the second aperture at a predetermined position. The bent fibers are bonded together using an adhesive material.