Fiber Coupled Laser Diode Array for Uniform Thermal Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional laser diodes used in thermal processing of semiconductor substrates require complex cooling systems, are prone to catastrophic failure, and suffer from performance degradation, leading to maintenance challenges and reduced throughput, with the risk of damaging other processing components due to proximity to the thermal processing chamber.
Innovation Solution
The use of fiber coupled laser diodes with an anomorphic optical system, including a cylindrical microlens array and telecentric imaging lens, generates a uniform irradiance pattern, allowing for independent control and remote placement of laser diodes, reducing maintenance complexity and improving processing efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional laser diodes are used near the thermal processing chamber, then thermal processing can be performed, but the risk of damage to other components increases and maintenance becomes complex
Solution Approach 1:
The system divides the laser processing function into separate modular units - individual laser diodes coupled to separate optical fibers. This segmentation allows each laser diode to be independently controlled and replaced, simplifying maintenance while improving reliability by isolating potential failure points.
Solution Approach 2:
The laser diodes are extracted from the thermal processing chamber environment and placed in a separate, protected location. Optical fibers transmit the laser energy through walls or barriers, removing the hazardous laser components from proximity to other sensitive processing components while maintaining the thermal processing capability.
2Reliability
If conventional laser diodes are used, then thermal processing is achieved, but performance degradation occurs over time
Solution Approach 1:
The system incorporates monitoring and control capabilities that allow for real-time detection of performance degradation. When degradation is detected, the system can automatically adjust operating parameters or trigger maintenance alerts, enabling proactive maintenance before catastrophic failure occurs and minimizing downtime.
Solution Approach 2:
The modular fiber-coupled laser diode design allows for pre-positioned replacement units. When a laser diode degrades, a replacement unit can be quickly swapped in without complex realignment or calibration procedures, significantly reducing maintenance time and maintaining production continuity.
3Productivity
If conventional laser diodes are used, then processing is performed, but throughput is reduced due to failures
Solution Approach 1:
By dividing the laser system into multiple independent fiber-coupled laser diode modules, the system ensures that failure of one module does not affect the operation of others. This segmentation maintains overall system throughput even when individual components require maintenance or replacement.
Solution Approach 2:
The system incorporates monitoring that provides feedback on the status and performance of each laser diode module. This feedback enables predictive maintenance scheduling and rapid response to failures, minimizing interruptions to production throughput and allowing for optimized maintenance planning during low-demand periods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration provides improved thermal processing characteristics by generating a uniform irradiance profile, reducing maintenance needs, and allowing for precise control of the irradiance profile, while minimizing the risk of damage to other components by keeping the laser diodes outside the processing chamber.
Implementation Method 1
The fiber coupled laser diodes generate a Gaussian radiation profile which is defocused by the lenses to generate a uniform intensity image
Implementation Method 2
A first lens is disposed proximate to a distal end of the fiber coupled laser diodes. A second lens is disposed proximate the first lens. The first lens and the second lens comprise an anomorphic optical imaging system
Implementation Method 3
The cylindrical microlens array and the telecentric imaging lens comprise an anomorphic optical imaging system
Implementation Method 4
A cylindrical microlens array is disposed between an image plane and the distal end of the fiber coupled laser diodes
Data Source
AI summary
Embodiments described herein relate to the rapid thermal processing of substrates. A fiber coupled laser diode array is provided in an optical system configured to generate a uniform irradiance pattern on the surface of a substrate. A plurality of individually controllable laser diodes are optically coupled via a plurality of fibers to one or more lenses. The fiber coupled laser diode array generates a Gaussian radiation profile which is defocused by the lenses to generate a uniform intensity image. In one embodiment, a field stop is disposed within the optical system.