Fiducial Marker Design for Scanning Probe Microscopy Calibration
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Solution Overview
Problem
Scanning probe microscopes face challenges in accurately and efficiently calibrating the probe tip location due to frequent wear and the need for precise positioning, which is time-consuming and uncertain with existing methods.
Innovation Solution
A fiducial marker design with dual reference patterns, one for optical sensors and another for scanning probe microscopy, encodes surface coordinate information to enable precise probe tip location determination, allowing for quick and accurate calibration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a full 2D image scan and analysis is performed for probe tip calibration, then measurement precision is improved, but loss of time increases
Solution Approach 1:
The patent extracts only the essential calibration information needed from the fiducial marker by implementing a coded marker system where specific patterns encode probe tip location data. Instead of scanning and analyzing the entire 2D image, the system directly decodes the pre-encoded positional information from the marker pattern, significantly reducing calibration time while maintaining precision.
Solution Approach 2:
The fiducial marker is pre-encoded with coordinate information during manufacturing, so that when the probe tip scans the marker, the location data is already embedded in the pattern. This preliminary encoding eliminates the need for complex real-time image analysis, allowing rapid decoding of probe tip position without sacrificing measurement precision.
2Measurement precision
If probe tip replacement is performed frequently to maintain accuracy, then measurement precision is improved, but loss of time increases
Solution Approach 1:
The system implements self-calibration capability through the coded fiducial marker, allowing the probe tip to automatically determine its own position relative to the marker. This self-service calibration eliminates the need for manual intervention and complex procedures, enabling rapid recalibration after each tip replacement and reducing the time penalty associated with frequent tip changes.
3Measurement precision
If a detailed 2D image analysis is performed for calibration, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The patent extracts only the necessary calibration data from the fiducial marker by using pre-encoded patterns. The decoded information directly provides probe tip location without requiring complex image processing algorithms, thereby reducing computational complexity while maintaining high measurement precision.
Solution Approach 2:
The fiducial marker uses a coded pattern that replicates coordinate information in a format directly readable by the system. This coded copy of spatial information eliminates the need for complex image analysis, as the marker itself contains the calibration data in an easily decodable format.
Data Source
AI summary
The invention is directed at a fiducial marker design, a fiducial marker, a scanning probe microscopy device and a method of calibrating a position of a probe tip. The fiducial marker design may be used as a fiducial marker for providing a positioning reference, and comprises at least one first reference pattern including at least one first reference element for enabling determination of a relative position of the fiducial marker with respect to a first sensor. The first sensor is configured for operating at a first scale of dimension. The fiducial marker further comprises a second reference pattern, which comprises a regular arrangement of markings, structured or shaped such as to encode therein surface coordinate information. This enables determination of a relative position of each marking with respect to a second sensor configured for operating at a second scale of dimension smaller than the first scale of dimension.