Filament Alignment Assembly for Precise Plasma Flood Gun Height Setting
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Solution Overview
Problem
Existing ion implantation technologies face challenges in accurately setting the height of filaments in plasma flood guns, leading to issues such as arcing on wafers and space charge remediation, which affect the efficiency and reliability of semiconductor manufacturing processes.
Innovation Solution
A filament alignment device is provided that includes a support plate, insulator, and a filament, with a main case and auxiliary case that allow precise adjustment and fixation of the filament height using height controllers, guide keys, and fixing hooks, ensuring accurate installation and reduced errors in filament positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional filament alignment device is used, then the structure is simple, but the filament height cannot be precisely set leading to alignment errors
Solution Approach 1:
The alignment device is divided into a main case and an auxiliary case that can be separated. The auxiliary case contains the filament and insulator assembly, while the main case contains the support plate with plate grooves. This segmentation allows for precise adjustment of the filament height within the auxiliary case while maintaining overall structural simplicity.
Solution Approach 2:
The filament is pre-installed on the insulator within the auxiliary case before assembly with the main case. The auxiliary case is designed with pre-formed plate grooves that guide the support plate positioning. This preliminary arrangement ensures precise filament height setting is achieved before final assembly, reducing alignment errors.
2Reliability
If the filament height is not precisely controlled, then the device structure remains simple, but emission current distribution becomes inaccurate leading to increased filament breakage
Solution Approach 1:
The auxiliary case is designed to be movable relative to the main case through a hinge connection, allowing dynamic adjustment of the filament height. This dynamic structure enables precise height control during assembly while maintaining reliability during operation, preventing filament breakage due to improper positioning.
Solution Approach 2:
The insulator acts as an intermediary component between the filament and the support plate. It provides electrical isolation while mechanically supporting the filament at the correct height. The insulator's structured design with plate grooves ensures precise positioning without requiring complex height control mechanisms.
3Manufacturing precision
If the PFG is not properly fixed, then the device assembly is easier, but alignment accuracy decreases affecting semiconductor manufacturing yield
Solution Approach 1:
The filament and insulator assembly is extracted as a separate auxiliary case unit before being integrated with the main case containing the support plate. This extraction allows the PFG to be precisely fixed within the auxiliary case using the plate groove mechanism, ensuring alignment accuracy while maintaining ease of assembly through modular construction.
Data Source
AI summary
A filament alignment device for accommodating a PFG including a support plate, an insulator on the support plate, and a filament at an end portion of the insulator includes a main case having a first plate groove into which a first portion of the support plate is inserted and an open side surface, an auxiliary case for covering at least a first area of the open side surface of the main case and having a second plate groove into which a second portion of the support plate is inserted, a height adjuster including a height controller on an upper sidewall of the main case and a fixing hook provided on an end portion of the height controller and which the filament is hung, and a hinge for rotatably connecting a sidewall of the auxiliary case to a sidewall of the main case.