Filament Lifetime Estimation via Low-Voltage Current Measurement

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Solution Overview

Problem

Charged particle beam devices face challenges in estimating the lifetime of filaments due to complex and costly circuit configurations required for measuring high-voltage currents, and existing methods are inefficient for beginners.

Innovation Solution

A boosting circuit is used to supply voltage to the filament, allowing for the estimation of remaining filament life by measuring current on the low-voltage side, simplifying the circuit configuration and enabling accurate lifetime prediction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If floating measurement is used to measure filament current at high voltage, then lifetime estimation becomes possible, but circuit configuration becomes complicated and cost increases

Engineering Contradiction:
Improvefilament current measurementVSAvoidcircuit configuration
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent introduces a current transformer as an intermediary device to measure filament current. The current transformer couples the high-voltage filament circuit to the low-voltage measurement circuit, enabling current measurement without direct electrical connection. This mediator allows accurate current measurement for lifetime estimation while keeping the measurement circuit simple and isolated from high voltage.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If high voltage is applied to AD converter for voltage measurement, then measurement is possible, but resolution becomes insufficient

Engineering Contradiction:
Improvevoltage measurementVSAvoidAD converter resolution
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The patent transforms the voltage measurement problem into a current measurement problem by measuring current on the low-voltage side of the boosting circuit. Instead of directly measuring high voltage with insufficient resolution, the system measures current at low voltage where AD converters have adequate resolution, then calculates voltage from the current measurement and circuit parameters.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Use of energy by moving object

If filament is used at high temperature for thermoelectron generation, then electron emission is achieved, but filament wear increases and lifetime decreases

Engineering Contradiction:
Improvethermoelectron generationVSAvoidfilament lifetime
Core Design Contradiction:
Use of energy by moving objectVSDuration of action of stationary object

Solution Approach 1:

The patent implements a feedback mechanism that continuously monitors filament current and calculates remaining lifetime based on current consumption patterns. The system provides real-time feedback about filament degradation to the user, enabling proactive replacement before catastrophic failure. This feedback loop allows optimization of filament usage and extends effective operational life through predictive maintenance.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for accurate estimation of filament lifetime with a cheap and simple circuit, reducing the risk of filament disconnection during observation and improving device efficiency.

Implementation Method 1

a boosting circuit which boosts a voltage to be supplied to a filament

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

a voltage is applied to both ends of the filament and a thermoelectron generated at the time of heating of the filament is used

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 3

a thermoelectron generated at the time of heating of the filament is used

Methodology Applied
Scientific EffectThermionic emission: Thermionic Emission

Data Source

PatentUS11348758B2Charged particle beam device
Publication Date: 2022.05.31 HITACHI HIGH TECH CORP
  • US11348758B2 patent drawing
  • US11348758B2 patent drawing
  • US11348758B2 patent drawing

AI summary

An objective of the present invention is to provide a charged particle beam device capable of estimating a lifetime of a filament of a charged particle beam source with a cheap and simple circuit configuration. The charged particle beam device according to the present invention includes a boosting circuit that boosts a voltage to be supplied to a filament and estimates a remaining duration of the filament using a measured value of a current flowing on a low-voltage side of the boosting circuit (see FIG. 3).