Film Edge Graph Display Range for Substrate Inspection
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Solution Overview
Problem
Existing display methods for substrates with films struggle to effectively visualize and analyze the edge positions of films around the substrate's circumference, leading to inefficiencies in processing and quality control.
Innovation Solution
A display method that acquires edge information from images of the substrate's peripheral region, displays a graph indicating edge positions for multiple circumferential positions, and determines a display range for the edge positions based on statistical information, allowing for improved visualization and analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If edge information is displayed without statistical analysis, then all data points are visible, but the graph becomes cluttered and difficult to interpret
Solution Approach 1:
The patent extracts only the statistically significant features from the complete edge position data. By calculating statistical values (mean, standard deviation, minimum, maximum) and displaying only these extracted features, the graph eliminates clutter while preserving essential information about edge position variations across the substrate circumference.
Solution Approach 2:
The patent transforms the raw edge position data into statistical parameters (mean position, deviation, range). This parameter transformation converts numerous individual data points into a condensed set of meaningful metrics that are easier to interpret while retaining the essential characteristics of the edge position distribution.
2Manufacturing precision
If comprehensive edge information is collected around the entire substrate circumference, then complete coverage is achieved, but the complexity of analysis increases
Solution Approach 1:
The patent extracts essential statistical characteristics from the comprehensive edge position data collected around the entire substrate circumference. By taking out only the mean, deviation, minimum, and maximum values, the system maintains complete measurement coverage while dramatically simplifying the analysis complexity.
Solution Approach 2:
The patent transforms the complex spatial distribution of edge positions into simplified statistical parameters. This parameter change converts the complex problem of analyzing edge positions at multiple circumferential locations into a simpler problem of interpreting statistical metrics that summarize the overall edge behavior.
3Ease of operation
If statistical information is used to determine display range, then the graph becomes easier to interpret, but some raw data may be excluded
Solution Approach 1:
The patent extracts the essential statistical features (mean, deviation, min, max) that define the display range. This extraction process selectively removes redundant raw data points while preserving the critical information needed to interpret edge position variations, achieving a balance between readability and information retention.
Solution Approach 2:
The patent displays a partial representation of the complete edge position data by showing statistical summaries rather than all individual measurements. This partial action is sufficient for practical interpretation and quality control purposes, while excessive display of all raw data would create unnecessary complexity.
Data Source
AI summary
A display method includes acquiring, based on an image obtained by imaging a peripheral region of a front surface of a substrate having a film formed on the front surface thereof, edge information indicating a relationship between a circumferential position and an edge position of the film in a radial direction of the substrate for each of multiple circumferential positions around a center of the substrate; displaying, on a monitor, a graph indicating the edge position for each of the multiple circumferential positions based on the edge information; and determining, before displaying the graph on the monitor, a display range for the edge position on the graph based on statistical information of the edge position included in the edge information.