Film Formation Simulation for Pattern Alignment Distortion Analysis
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Solution Overview
Problem
Existing film forming techniques face challenges in accurately predicting and correcting positional deviations between patterns on substrates due to local distortions caused by convex and concave portions, surface tension, and curable composition distribution, requiring time-consuming trial and error adjustments.
Innovation Solution
A simulation method using an information processing apparatus to predict the behavior of a curable composition during film formation, calculating and displaying the distribution of distortions on members, superimposing relevant input information as a two-dimensional image to identify and correct positional deviations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If trial and error adjustment of film forming conditions is performed using a film forming apparatus, then the position and cause of positional deviation can be specified, but enormous time is required
Solution Approach 1:
The patent creates a virtual copy of the film forming process through simulation. A simulation apparatus replicates the physical film forming apparatus's behavior, allowing positional deviation analysis in a virtual environment. This copying approach enables specification of deviation causes without time-consuming physical trial and error, as the simulation can rapidly evaluate different conditions without actual material consumption or equipment wear.
Solution Approach 2:
The simulation apparatus performs preliminary analysis of positional deviations before actual film forming adjustments are made. By predicting where and why deviations will occur based on input data about the film forming conditions, substrate properties, and material characteristics, the system prepares adjustment strategies in advance, eliminating the need for lengthy iterative adjustments on the actual equipment.
2Manufacturing precision
If film forming conditions are adjusted to correct positional deviation, then alignment accuracy improves, but time-consuming trial and error is required to specify the position and cause
Solution Approach 1:
The simulation creates a virtual model that copies the complex interactions in film forming, allowing rapid evaluation of how different conditions affect alignment accuracy. This virtual testing enables identification of optimal conditions without repeated physical trials, thereby improving productivity while maintaining the ability to achieve high alignment accuracy.
Solution Approach 2:
The simulation apparatus provides feedback about the expected outcomes of different film forming conditions before they are implemented. By analyzing the simulated results, operators can understand the relationship between conditions and alignment accuracy, making informed adjustments that achieve desired precision more efficiently without random trial and error.
3Loss of time
If a simulator is used to specify the position and cause of positional deviation, then adjustment time is reduced, but the simulation must accurately model complex interactions including surface tension and material distribution
Solution Approach 1:
The simulation model segments the complex film forming process into distinct components: substrate properties, material distribution, surface tension effects, and their interactions. By dividing the problem into manageable segments, the simulation can accurately model each factor separately and combine them, reducing the overall complexity while maintaining accuracy and enabling rapid analysis.
Solution Approach 2:
The simulation apparatus acts as an intermediary between the physical film forming system and the operator. It translates complex physical interactions into comprehensible results about positional deviation causes, shielding the operator from the underlying complexity while providing accurate specification of deviation sources through the virtual model.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates rapid and precise alignment of patterns by simulating and visualizing distortion distributions, reducing the time and effort required to adjust film forming conditions.
Implementation Method 1
local deformation (distortion) may occur on the mold and/or the substrate due to convex and concave portions on the substrate surface, the surface tension of the curable composition, the distribution of the curable composition arranged on the substrate
Data Source
AI summary
The present invention provides a simulation method of predicting a behavior of a composition in processing of bringing the composition arranged on a first member into contact with a second member and forming a film of the composition on the first member, comprising: predicting the behavior of the composition in the processing; calculating a distribution of distortion that occurs in at least one of the first member and the second member in the processing; and displaying the distribution of distortion calculated in the calculating, wherein in the displaying, in a case where at least one piece of input information is selected from a plurality of pieces of input information used to predict the behavior of the composition, the at least one piece of input information is displayed to be superimposed as a two-dimensional image on the distribution of distortion.