Film Formation Image Comparison for Curable Composition Control

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Solution Overview

Problem

Existing film forming apparatuses face challenges in quickly grasping and responding to unforeseen events during the film formation process of a curable composition between a substrate and a mold, as these events often go unconsidered in simulations, leading to inefficiencies and the need for lengthy trial-and-error optimization of process parameters.

Innovation Solution

An information processing apparatus is provided, equipped with an image capturing device to obtain captured images of the film formation process, a generator to predict the behavior of the curable composition, and a display controller to compare captured images with predicted images in real-time, allowing for immediate identification and adaptation to any discrepancies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If simulation technique is used to optimize process parameters, then manufacturing precision is improved, but loss of time occurs due to trial-and-error optimization

Engineering Contradiction:
Improvefilm formation precisionVSAvoidoptimization time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent creates a visual copy (image) of the curable composition's behavior during film formation and compares it with the simulation result. This allows direct visual verification of whether the actual process matches the simulated prediction, eliminating the need for repeated trial-and-error optimization and reducing time loss while maintaining precision.

Inventive Principle:
Principle #26Copying

2Reliability

If comprehensive simulation is performed to cover all possible events, then reliability is improved, but device complexity increases

Engineering Contradiction:
Improveprocess reliabilityVSAvoidsimulation system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent implements a feedback mechanism where the actual behavior of the curable composition is captured as an image and compared with the simulation result. This feedback loop allows verification of simulation accuracy and detection of unforeseen events without requiring the simulation system to model every possible scenario, thus maintaining reliability while avoiding excessive complexity.

Inventive Principle:
Principle #23Feedback

3Productivity

If real-time monitoring is implemented to detect unforeseen events, then productivity is improved, but device complexity increases

Engineering Contradiction:
Improveprocess efficiencyVSAvoidmonitoring system complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent uses image capture to create a visual copy of the film formation process, enabling real-time monitoring of the curable composition's behavior. This simple imaging approach allows detection of unforeseen events and immediate comparison with simulation results, improving productivity without requiring complex monitoring systems.

Inventive Principle:
Principle #26Copying

Data Source

PatentUS11721011B2Information processing apparatus, film forming apparatus, method of manufacturing article, and non-transitory computer-readable storage medium
Publication Date: 2023.08.08 CANON KK
  • US11721011B2 patent drawing
  • US11721011B2 patent drawing
  • US11721011B2 patent drawing

AI summary

The present invention provides an information processing apparatus comprising: an obtainer configured to, in a process of supplying a curable composition onto a substrate or a mold and forming a film of the curable composition in a space between the substrate and the mold, obtain the captured image of the curable composition; a generator configured to generate a predicted image representing a prediction result of a behavior of the curable composition on the substrate in the process; and a display controller configured to display, on a display unit, the captured image and the predicted image to be comparable to each other.