Film Forming Apparatus Temperature Control via Predictive Outer Temp Monitoring
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Solution Overview
Problem
In semiconductor manufacturing, the heat treatment apparatus faces challenges in efficiently raising the inner temperature of a processing container while avoiding excessive outer temperature rises, particularly when forming high-reflectance metal films like molybdenum, which slows down the heating process and can lead to safety issues or reduced productivity.
Innovation Solution
A control method that predicts the outer temperature ahead of time using a prediction model and adjusts the heating unit's power output to prevent excessive temperature rises by switching between first and second power settings based on measured inner and outer temperatures, ensuring the outer temperature does not exceed a set limit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If high power is output to the heating unit to rapidly raise the inner temperature, then the inner temperature increases quickly improving productivity, but the outer temperature may excessively rise causing safety issues
Solution Approach 1:
The prediction model calculates the predicted outer temperature in advance before actually outputting power to the heating unit. This preliminary prediction allows the control system to anticipate potential outer temperature excessive rises and adjust power output accordingly, preventing safety issues before they occur while still enabling rapid inner temperature increase when safe
Solution Approach 2:
The control system uses feedback from both inner temperature sensor and outer temperature sensor, combined with prediction model output, to dynamically adjust the power to the heating unit. This closed-loop feedback mechanism enables the system to rapidly heat the inner region while continuously monitoring and controlling outer temperature to prevent excessive rises
2Object-affected harmful factors
If low power is output to the heating unit to prevent outer temperature excessive rise, then safety is maintained, but the inner temperature increases slowly reducing productivity
Solution Approach 1:
The system dynamically adjusts the power output to the heating unit based on real-time conditions. By combining prediction model output with actual temperature measurements from both inner and outer sensors, the system optimizes power delivery to maintain safety limits on outer temperature while maximizing the heating rate for inner temperature increase, thus improving productivity without compromising safety
3Object-affected harmful factors
If the heating unit is shutdown due to outer temperature exceeding safety threshold, then safety is protected, but the processing is interrupted reducing productivity
Solution Approach 1:
The prediction model performs preliminary calculation of the predicted outer temperature before power is actually applied to the heating unit. This advance prediction allows the control system to prevent outer temperature from exceeding the safety threshold in the first place, avoiding heater shutdowns and maintaining processing continuity while still protecting safety
Solution Approach 2:
The system continuously monitors both inner and outer temperatures with feedback control. By using the prediction model alongside real-time sensor data, the system can detect potential safety threshold violations early and adjust power output accordingly, preventing heater shutdowns while maintaining safety compliance and processing continuity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for rapid and controlled inner temperature increases without excessive outer temperature rises, enhancing productivity and safety by preventing heater shutdowns due to safety thresholds.
Implementation Method 1
a heating unit 40... calculating a first power to be output to a heating unit disposed in the processing container such that the first temperature approaches a target temperature
Implementation Method 2
acquiring a first temperature measured by a first temperature sensor in a tubular member in a processing container... acquiring a second temperature measured by a second temperature sensor provided outside the tubular member
Data Source
AI summary
A control method of a film forming apparatus includes (a) acquiring a first temperature measured by a first temperature sensor in a tubular member in a processing container of the film forming apparatus; (b) calculating a first power to be output to a heating unit disposed in the processing container; (c) acquiring a second temperature measured by a second temperature sensor provided outside the tubular member in the processing container; (d) calculating a second power to be output to the heating unit; (e) calculating a predicted value of the second temperature at a predetermined time ahead, from the second temperature based on a prediction model; (f) outputting either the first power or the second power to the heating unit according to the predicted value of the second temperature; and (g) repeating (a) to (f) in a predetermined cycle.