Film Formation Simulation Method Using Segmented Accuracy Regions

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Solution Overview

Problem

Current simulation methods for film formation using curable compositions on substrates require high computational costs due to the need for detailed fluid computations, often resulting in increased costs and potential user errors when limiting computational regions.

Innovation Solution

A simulation method that reduces computational cost by executing two simulations: a first simulation with lower accuracy over a larger region and a second simulation with higher accuracy over a smaller, specifically determined region based on design information, arrangement, and simulation results, optimizing the simulation range to minimize computational load while maintaining accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If fluid computation considering local shapes and droplet interaction is executed to predict bubble generation, then simulation accuracy is improved, but computational cost increases

Engineering Contradiction:
Improvesimulation accuracyVSAvoidcomputational cost
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The simulation region is segmented into a first region (entire computational domain) and a second region (specific region of interest). The first simulation executes over the entire first region with lower accuracy, while the second simulation executes only over the smaller second region with higher accuracy. This segmentation allows high-accuracy fluid computation to be applied only where necessary, reducing overall computational cost while maintaining accuracy in critical areas.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different simulation accuracy levels are applied to different regions based on their importance. The second region, where bubble generation is most likely to occur or where critical film formation happens, receives high-accuracy fluid computation with detailed local shape considerations. Other regions receive lower-accuracy computation, optimizing the balance between accuracy and computational cost.

Inventive Principle:
Principle #3Local quality

2Use of energy by moving object

If computational region is limited to reduce computational cost, then computational cost decreases, but user errors increase due to dependency on user ability

Engineering Contradiction:
Improvecomputational costVSAvoiduser error rate
Core Design Contradiction:
Use of energy by moving objectVSReliability

Solution Approach 1:

The simulation system automatically determines and executes the second simulation in the second region without requiring user intervention to specify the region. The system uses design information, arrangement information, and first simulation results to automatically identify where high-accuracy computation is needed, eliminating user errors while maintaining computational efficiency.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The first simulation is executed preliminarily over the entire region to gather data about droplet behavior, film formation, and potential bubble generation areas. These results are then used to automatically determine the second region for high-accuracy computation, so the system is already prepared to identify critical areas before the second simulation begins.

Inventive Principle:
Principle #10Preliminary action

3Manufacturing precision

If trial and error adjustment is performed using apparatus to optimize droplet arrangement and pressing conditions, then film quality is improved, but time and cost increase

Engineering Contradiction:
Improvefilm qualityVSAvoidadjustment time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

Instead of performing physical trial and error adjustments with the actual film forming apparatus, the system creates a virtual copy through simulation. The simulation models the film formation process, allowing users to test different droplet arrangements and pressing conditions virtually. This digital twin approach eliminates the need for repeated physical trials, saving time and cost while maintaining the ability to optimize film quality.

Inventive Principle:
Principle #26Copying

Solution Approach 2:

The simulation performs preliminary analysis of film formation behavior before actual manufacturing. By predicting bubble generation, wet spreading, and film uniformity in advance, the system allows users to optimize process parameters virtually. This preliminary virtual testing prevents costly and time-consuming physical trial and error adjustments.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS20220035968A1Simulation method, simulation apparatus, film forming apparatus, article manufacturing method and non-transitory storage medium
Publication Date: 2022.02.03 CANON KK
  • US20220035968A1 patent drawing
  • US20220035968A1 patent drawing
  • US20220035968A1 patent drawing

AI summary

The present invention provides a simulation method of predicting a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on a first member into contact with a second member and forming a film of the curable composition in a space between the first member and the second member, the method including determining a second range for executing second simulation for predicting the behavior with second accuracy higher than first accuracy, the second range being included in a first range for executing first simulation for predicting the behavior with the first accuracy and the second range being smaller than the first range, executing the second simulation in the second range, and displaying a result of the second simulation executed in the second range.