Film Thickness Measurement with Stage Orientation Correction
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Solution Overview
Problem
Existing film thickness measuring devices struggle to accurately measure ultrathin films of 10 nm or less due to variations in stage inclination and orientation, leading to inconsistent measurement results for each substrate.
Innovation Solution
A film thickness measuring device with a stage that includes a rotation mechanism and orientation detector, controlled by a controller to adjust the stage orientation to a desired position, ensuring consistent measurement accuracy by compensating for stage inclination and maintaining a constant orientation during film thickness measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If stage orientation is not controlled, then measurement process is simple, but measurement precision deteriorates due to stage inclination variations
Solution Approach 1:
The orientation detector detects the stage orientation before measurement, and the controller preliminarily adjusts the stage orientation to a predetermined orientation based on the detection result. This preliminary action ensures that the stage is properly oriented before the actual film thickness measurement begins, eliminating measurement errors caused by stage inclination while maintaining a relatively simple device structure.
Solution Approach 2:
The orientation detector provides feedback information about the stage orientation to the controller. The controller uses this feedback to automatically adjust the stage orientation to the predetermined orientation. This feedback mechanism enables precise orientation control without requiring complex mechanical adjustment mechanisms, resolving the contradiction between measurement precision and device complexity.
2Measurement precision
If stage orientation varies for each substrate, then substrate processing is flexible, but measurement precision deteriorates due to inconsistent orientation
Solution Approach 1:
Before measuring each substrate, the orientation detector detects the actual stage orientation, and the controller preliminarily adjusts the stage to the predetermined orientation based on the detection result. This ensures consistent measurement conditions for all substrates while maintaining flexible substrate placement, as the automatic adjustment occurs transparently during the measurement process.
Solution Approach 2:
The measurement system performs self-correction by automatically detecting and adjusting stage orientation for each substrate without requiring manual intervention. The controller autonomously manages the orientation adjustment based on orientation detector feedback, ensuring measurement consistency while preserving operational flexibility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves consistent and accurate film thickness measurement of ultrathin films by stabilizing stage orientation, reducing measurement variations to 0.01 nm or less, and ensuring uniform film thickness distribution across substrates.
Implementation Method 1
a light receiving/emitting unit configured to emit light for measuring a film thickness to the substrate on the stage and receive a reflected light from the substrate disposed on the stage
Data Source
AI summary
A film thickness measuring device includes: a stage on which a substrate is disposed; a light emitter/receiver configured to emit light for measuring a film thickness to the substrate disposed on the stage and receive a reflected light from the substrate disposed on the stage; a rotation mechanism configured to rotate the stage; an orientation detector configured to detect an orientation of the stage; and a controller. Based on a detection result by the orientation detector, the controller controls the rotation mechanism so that the orientation of the stage becomes a desired orientation when the substrate is disposed.