Film Touch Sensor SiOxNy Capping Layer Peeling
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Solution Overview
Problem
Existing film touch sensors face challenges in achieving high visibility and low resistance conductive patterns, especially when applying them to flexible displays, due to issues with peeling off the base film and metal wirings from the carrier substrate, and existing methods are not suitable for large-size or high-temperature processes.
Innovation Solution
A film touch sensor design that includes a conductive pattern layer and a separation layer with a capping layer of SiOxNy (0≤x≤4, y=4−x) interposed between them, along with protective layers, which improves visibility and reduces resistance by enhancing the crystallinity of the conductive pattern layer, such as ITO, and allows for easier peeling off from the carrier substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If an inorganic peeling-off agent such as diamond-like carbon or zirconium oxide thin film is formed on the substrate surface, then the peeling-off process should be easier, but the base film and metal wirings are not smoothly peeled off, leaving residues and organic material on the surfaces
Solution Approach 1:
The patent introduces an organic peeling-off agent layer as an intermediary between the inorganic peeling-off agent layer and the base film. This organic layer acts as a mediator that enables smooth peeling by reducing adhesion between the inorganic layer and the base film, while preventing direct contact and contamination between the inorganic layer and the metal wiring surfaces during the peeling process.
2Device complexity
If the conductive pattern layer is formed directly on the base film, then the process is simpler, but the visibility of touch patterns is poor and resistance is high
Solution Approach 1:
The patent segments the conductive pattern structure into multiple layers: a lower conductive pattern layer formed on the base film, and an upper conductive pattern layer formed on the peeling-off agent layers. This segmentation allows the lower layer to provide electrical conductivity while the upper layer provides optical visibility, resolving the contradiction between process simplicity and performance requirements.
3Productivity
If existing peeling methods are used, then the base film can be peeled off, but the method is not suitable for large-size or high-temperature display processes
Solution Approach 1:
The patent employs a composite peeling-off agent structure consisting of both organic and inorganic layers. This composite material approach provides thermal stability for high-temperature processes and scalability for large-size displays, while maintaining effective peeling functionality. The combination of material properties enables broader process compatibility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed solution enhances the visibility of touch patterns and reduces the resistance of the conductive pattern layer, improving the sensitivity of the touch sensor while preventing thermal damage and ensuring smooth peeling off from the carrier substrate, making it suitable for flexible displays.
Implementation Method 1
reduces the resistance of the conductive pattern layer, improving the sensitivity of the touch sensor while preventing thermal damage and ensuring smooth peeling off from the carrier substrate
Implementation Method 2
a separation layer which allows peeling off of the base film and the conductive pattern layer from the carrier substrate
Data Source
AI summary
A film touch sensor in which a conductive pattern layer and a separation layer are sequentially disposed, and a base film is disposed on at least one surface of the conductive pattern layer and the separation layer, includes a capping layer which is disposed between the separation layer and the conductive pattern layer and includes SiOxNy (0≤x≤4, y=4−x), thereby it is possible to improve visibility of an image and reduce a resistance of the conductive pattern layer, and a method for fabricating the same.

