Variable Wavelength Interference Filter Actuator Segmentation
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Solution Overview
Problem
Existing variable wavelength interference filters face accuracy issues in controlling the inter-reflecting film gap due to variations in drive voltage caused by noise, leading to degradation in gap control precision.
Innovation Solution
The implementation of a configuration with multiple independent electrostatic actuators, each comprising multiple partial actuators of the same shape, disposed at regular angular intervals around the optical interference region, allows for balanced electrostatic forces and precise control of the inter-reflecting film gap, maintaining parallelism between reflecting films.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single electrostatic actuator is used to control the inter-reflecting film gap, then the device complexity is reduced, but the gap control precision deteriorates due to voltage variations caused by noise
Solution Approach 1:
The single electrostatic actuator is segmented into multiple independent actuators (first actuator and second actuator, each with multiple partial actuators). This segmentation allows independent control of each actuator, enabling finer voltage settings and reduced impact of noise-induced voltage variations, thereby improving gap control precision while managing device complexity through modular configuration
Solution Approach 2:
Multiple independent actuators are merged to work together in controlling the inter-reflecting film gap. The first and second actuators operate simultaneously with coordinated voltage application, combining their control capabilities to achieve higher precision gap control that surpasses what a single actuator can accomplish
2Measurement precision
If multiple independent actuators are disposed outside the optical interference region, then the gap control accuracy is improved, but the device complexity increases
Solution Approach 1:
The actuators are arranged in a radial pattern around the optical interference region, utilizing angular positioning (regular angular intervals) rather than linear arrangement. This dimensional change in spatial configuration allows multiple actuators to be disposed outside the optical interference region while maintaining compact device structure and managing overall complexity
Solution Approach 2:
The actuators are positioned asymmetrically around the optical interference region at regular angular intervals, with each actuator located at a specific angular position. This asymmetric radial arrangement enables independent control of each actuator while maintaining balanced electrostatic forces, improving gap control accuracy without excessive complexity increase
3Stability of the object's composition
If partial actuators are disposed at regular angular intervals with same distance from center point, then the parallelism between reflecting films is maintained, but the manufacturing precision requirements increase
Solution Approach 1:
The actuator system is segmented into multiple identical partial actuators with the same shape and size, disposed at regular angular intervals. This segmentation with identical repeating units simplifies manufacturing by using standardized components, while the regular angular positioning maintains balanced forces to preserve parallelism between reflecting films
Solution Approach 2:
Each partial actuator is designed with identical local properties (same shape, size, and electrical characteristics) to ensure uniform electrostatic force generation. This local quality consistency across all partial actuators, combined with their symmetric radial arrangement, maintains parallelism between reflecting films while allowing for standardized manufacturing processes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables finer voltage settings and more accurate control of the inter-reflecting film gap, reducing the impact of noise and environmental fluctuations, thereby enhancing the precision and reliability of the gap control.
Implementation Method 1
the first actuator and the second actuator, which can be independently driven, are disposed outside the optical interference region where the first reflecting film and the second reflecting film overlap each other. In such a configuration as described above, it is possible to drive the first actuator and the second actuator independently of each other. Therefore, it is possible to perform finer voltage setting, and to perform accurate control of the inter-reflecting film gap
Data Source
AI summary
A variable wavelength interference filter includes a stationary substrate provided with a stationary reflecting film, a movable substrate provided with a movable reflecting film, a first electrostatic actuator, and a second electrostatic actuator which can be driven independently of the first electrostatic actuator, two first partial actuators constituting the first electrostatic actuator have the same shape as each other in the plan view, and are arranged at regular angular intervals and with the same distance with respect to the filter center point, and two second partial actuators constituting the second electrostatic actuator have the same shape as each other in the plan view, and are arranged at regular angular intervals and with the same distance with respect to the filter center point.