Filter Membrane Analysis for Real-Time Regeneration Decisions
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Solution Overview
Problem
Existing filter membranes in semiconductor manufacturing plants do not accurately adhere to manufacturer specifications, leading to increased scrap and material costs due to ineffective particle filtration, which results in defective semiconductor devices.
Innovation Solution
A system and method for testing filter membranes in real-time conditions using a non-destructive approach that analyzes the entire filter membrane, determining pore sizes and distributions under real-world use scenarios, providing updated technical specifications for accurate filter performance monitoring and regeneration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If existing filter membranes are used without real-time testing, then manufacturing and operational simplicity is maintained, but filter performance does not accurately adhere to manufacturer specifications leading to increased scrap and material costs
Solution Approach 1:
The patent replaces traditional mechanical/destructive filter testing methods with an optical measurement system. The system uses optical elements (lenses, mirrors, detectors) to measure particle sizes and filter performance non-destructively, eliminating the need for physical sample destruction while providing accurate real-time measurements of filter membrane properties.
Solution Approach 2:
The patent creates an optical copy or representation of the filter membrane's performance characteristics through non-contact optical measurement. Instead of physically destroying the filter to analyze it, the system optically characterizes the filter's pore structure and particle filtration capabilities, allowing continuous monitoring without compromising the filter's operational integrity.
2Measurement precision
If destructive testing methods are used to analyze filter membranes, then measurement accuracy is improved, but the filter membrane cannot be reused and must be replaced
Solution Approach 1:
The patent substitutes mechanical/destructive analysis with optical measurement techniques. The system uses optical elements to characterize filter membrane pore structures and particle retention properties without physical contact or material destruction, enabling accurate measurements while preserving the filter membrane for continued use.
Solution Approach 2:
The patent creates an optical characterization copy of the filter membrane's properties rather than physical samples. The system optically measures and records pore size distributions, particle retention efficiency, and other critical filter parameters, providing accurate data without consuming or destroying the filter membrane material.
3Reliability
If real-time filter performance monitoring is implemented, then defective semiconductor devices are reduced, but additional monitoring infrastructure and costs are required
Solution Approach 1:
The patent replaces complex mechanical monitoring systems with optical measurement techniques. The system uses optical elements to continuously and non-intrusively monitor filter performance in real-time, providing reliable data on particle filtration efficiency without requiring complex mechanical sampling or analysis infrastructure.
Solution Approach 2:
The patent creates continuous optical copies or representations of filter performance characteristics during operation. The system optically characterizes the filter's real-time performance state, enabling continuous monitoring and detection of degradation without requiring physical sampling, complex mechanical systems, or interrupting the semiconductor manufacturing process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method reduces the likelihood of defective semiconductor devices by ensuring accurate filter performance, minimizing scrap and material costs through more reliable filter membrane testing and regeneration processes.
Implementation Method 1
a filter along the fluid pathway configured to filter the fluid as the fluid passes through the filter along the fluid pathway
Data Source
AI summary
The present disclosure is directed to various methods and systems for monitoring real time efficiency of filters as well as testing the filters with tests that are similar to real world use of the filters to update technical specifications of the filters. The methods and systems monitoring the real time efficiency of the filters may utilize one or more particle counters to monitor their efficiency in real time. The data collected by the particle counters may be utilized to determine whether respective ones of the filters need to be replaced or regenerated by a backwash regeneration process. The updated technical specifications from the real world testing of the filters may be utilized in determining whether respective ones of the filters need to be replaced or regenerated. These real world testing and real time monitoring reduces the likelihood that workpieces are exposed to contaminant particles reducing scrap costs.