Filter Bubble Removal Flow Path in Substrate Processing
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Solution Overview
Problem
The accumulation of bubbles in filters used in substrate processing apparatuses leads to reduced flow rates, necessitating frequent filter replacements, which increases environmental load.
Innovation Solution
A substrate processing apparatus with upstream and downstream pipings and a removing liquid supplying portion to pass bubble-removing liquid through the filter, along with cleaning pipings and valves to manage liquid flow, reducing the need for filter replacements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a filter is used to remove particles from processing liquid, then particle removal capability is improved, but bubble accumulation causes flow rate reduction and frequent filter replacement
Solution Approach 1:
The system performs preliminary bubble removal by circulating bubble-removing liquid through the filter before the processing liquid is supplied. This preliminary action prevents bubbles from accumulating and clogging the filter during normal operation, maintaining flow rate while preserving particle removal capability.
Solution Approach 2:
A bubble-removing liquid is introduced as an intermediary substance to remove bubbles from the processing liquid. This intermediary liquid circulates through the filter, absorbs bubbles, and prevents them from clogging the filter media, thereby maintaining both particle removal capability and flow rate.
2Productivity
If filter is replaced frequently to maintain flow rate, then flow rate is maintained, but environmental load increases
Solution Approach 1:
Instead of discarding the filter frequently, the system recovers its performance by removing accumulated bubbles through circulation of bubble-removing liquid. This restores the filter's flow rate capability without replacing it, thereby reducing environmental load while maintaining productivity.
3Productivity
If processing liquid with bubbles flows continuously through piping, then processing continues uninterrupted, but bubbles accumulate in filter causing clogging
Solution Approach 1:
The system maintains continuous processing by simultaneously circulating bubble-removing liquid through the filter during normal operation. This continuous action prevents bubble accumulation and filter clogging, allowing uninterrupted processing while preserving filter reliability.
Solution Approach 2:
The bubble-removing liquid acts as an intermediary that continuously passes through the filter, absorbing bubbles before they can clog the filter media. This intermediary circulation prevents filter clogging while allowing continuous processing liquid flow.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively reduces the frequency of filter replacements by maintaining flow rates through bubble removal, thus minimizing environmental impact.
Implementation Method 1
The removing liquid supplying portion supplies a bubble removing liquid for removing bubbles clogging the filter to the one of the upstream-side piping and the downstream-side piping
Implementation Method 2
The filter catches particles that are contained in the processing liquid which passes through the inside of the piping
Implementation Method 3
The cleaning liquid supplying portion supplies a cleaning liquid for washing away the processing liquid to the cleaning piping
Data Source
AI summary
A substrate processing apparatus is provided with a substrate processor a piping, a filter, an upstream-side piping, a downstream-side piping, and a removing liquid supply. The substrate processor processes a substrate W. The piping allows a processing liquid to flow therethrough toward the substrate processor. The filter is disposed in the piping. The upstream-side piping is connected to the piping at the upstream side of the filter. The downstream-side piping is connected to the piping at the downstream side of the filter. The removing liquid supply supplies a bubble removing liquid to one of the upstream-side piping and the downstream-side piping. The substrate processing apparatus allows the bubble removing liquid to pass from the one of the upstream-side piping and the downstream-side piping via the filter to the other of the upstream-side piping and the downstream-side piping.