Filter Circuit Protects Heater AC Power Supply in Substrate Treatment
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Solution Overview
Problem
The existing substrate treatment apparatuses face damage to the AC power supply connected to the heater due to the AC power used for generating plasma, which is not effectively protected.
Innovation Solution
A substrate treatment apparatus is designed with a filter circuit that includes a low-pass filter with a cut-off frequency lower than the AC power frequency and a high-pass filter with a cut-off frequency higher than the AC power frequency, connected in parallel to protect the AC power supply for the heater by attenuating the AC power.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If AC power is supplied to generate plasma between electrodes, then substrate treatment function is improved, but AC power supply connected to heater is damaged
Solution Approach 1:
The patent introduces a filter circuit as an intermediary component between the AC power supply for plasma generation and the heater. This filter circuit selectively blocks high-frequency AC power used for plasma generation while allowing low-frequency power to reach the heater, thus protecting the heater's power supply without affecting substrate treatment functionality.
Solution Approach 2:
The patent segments the power supply system into two independent channels: one for plasma generation and another for heater control. By using separate AC power supplies and a filter circuit, the system divides the power delivery paths to prevent interference and damage between the two functions.
2Productivity
If AC power supply for plasma generation is used, then plasma generation function is improved, but RF noise affects apparatus operation
Solution Approach 1:
The filter circuit serves as a mediator that allows plasma-generating AC power to reach the electrodes while blocking the same power from entering the heater circuit. This intermediary structure enables plasma generation while preventing RF noise from disrupting other apparatus components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively prevents AC power from flowing to the heater's power supply, thereby protecting the AC power supply and the entire apparatus from RF noise, ensuring reliable operation.
Implementation Method 1
a filter circuit connected to the heater, wherein a low-pass filter with a cut-off frequency that is lower than a first frequency and a high-pass filter with a cut-off frequency that is higher than the first frequency are connected in parallel
Implementation Method 2
supplying AC power to the lower electrode while supplying a material gas to the gap between the lower electrode and an upper electrode to generate plasma between the lower electrode and the upper electrode
Implementation Method 3
a heater included in the lower electrode to heat the lower electrode
Data Source
AI summary
[Problem] A substrate treatment apparatus that can protect an AC power supply connected to a heater is provided.[Means for solving the problem] A substrate treatment apparatus includes a lower electrode formed of a dielectric, a first AC power supply that is connected to a first internal electrode included in the lower electrode and supplies AC power with a first frequency, a heater included in the lower electrode to heat the lower electrode, a filter circuit connected to the heater, and a second AC power supply connected to the heater via the filter circuit and used for the heater, in which the filter circuit includes a parallel circuit that connects a low-pass filter with a cut-off frequency that is lower than the first frequency and a high-pass filter with a cut-off frequency that is higher than the first frequency in parallel.