Wavelength Tunable Interference Filter Electrode Width Variation
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Solution Overview
Problem
Wavelength tunable interference filters with non-circular movable sections suffer from in-plane wavelength variation due to non-uniform gap size, leading to decreased precision and restricted shape configurations.
Innovation Solution
A wavelength tunable interference filter design with a movable section and electrode configuration where the electrode width varies in the circumferential direction to evenly distribute displacement, minimizing bending and ensuring uniform wavelength output by adjusting the electrode widths based on the shape of the movable section.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the movable section has a non-circular shape to increase design flexibility, then shape adaptability is improved, but the gap size becomes non-uniform causing wavelength precision to deteriorate
Solution Approach 1:
The electrode width is varied in the circumferential direction to create local differences in electrostatic force distribution. This local quality adjustment compensates for the non-uniform gap size caused by the non-circular movable section shape, ensuring uniform wavelength output across the entire mirror region while maintaining shape flexibility.
2Adaptability or versatility
If the movable section is displaced to tune the wavelength, then wavelength tunability is improved, but the non-uniform gap size causes in-plane wavelength variation deteriorating precision
Solution Approach 1:
The electrode width parameter is changed in the circumferential direction to adjust the electrostatic force distribution. This parameter modification compensates for the non-uniform gap size that occurs during displacement, ensuring that the wavelength remains uniform across the mirror region while maintaining full wavelength tunability capability.
3Device complexity
If a uniform electrode width is used to simplify the structure, then device complexity is reduced, but non-circular movable sections cannot achieve uniform displacement causing wavelength precision to deteriorate
Solution Approach 1:
The electrode width is made asymmetric in the circumferential direction to match the non-circular movable section geometry. This asymmetric electrode design creates the necessary non-uniform electrostatic force distribution to achieve uniform displacement across the entire movable section, thereby maintaining wavelength precision without requiring a perfectly circular shape.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enhances wavelength precision by uniformly displacing the movable section, reducing in-plane wavelength variation and allowing for more flexible shape configurations while maintaining high precision.
Implementation Method 1
an electrode so provided in a region outside the second mirror as to surround the second mirror along a circumferential direction thereof... the electrode is configured to displace the movable section in the first direction when voltage is applied to the electrode
Implementation Method 2
a mirror region where light undergoes multiple reflection for interference is the region where the first mirror and the second mirror coincide with each other in the plan view in the first direction
Data Source
AI summary
A wavelength tunable interference filter includes a movable section having a mirror region that faces a first mirror in a first direction and an electrode so provided in a region outside the mirror region in a plan view viewed in the first direction as to surround the mirror region along the circumferential direction thereof, the electrode configured to displace the movable section in the first direction when voltage is applied to the electrode, and the width of the electrode in the plan view varies in the circumferential direction.